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- W1981352511 endingPage "289" @default.
- W1981352511 startingPage "286" @default.
- W1981352511 abstract "Selective etching on the surface of single-crystalline 4H-SiC was performed using ClF3 gas at 700 K and at atmospheric pressure in a cold wall reactor. The etch pits at the Si-face and C-face 4H-SiC surface may have relationship with the threading edge and screw dislocation." @default.
- W1981352511 created "2016-06-24" @default.
- W1981352511 creator A5017043130 @default.
- W1981352511 creator A5023839579 @default.
- W1981352511 creator A5025577408 @default.
- W1981352511 creator A5031711045 @default.
- W1981352511 creator A5048008812 @default.
- W1981352511 creator A5059311444 @default.
- W1981352511 creator A5077769295 @default.
- W1981352511 date "2011-03-01" @default.
- W1981352511 modified "2023-10-16" @default.
- W1981352511 title "Etch Pits on 4H-SiC Surface Produced by ClF<sub>3</sub> Gas" @default.
- W1981352511 cites W1996653453 @default.
- W1981352511 cites W2005884284 @default.
- W1981352511 cites W2037189182 @default.
- W1981352511 cites W2090997602 @default.
- W1981352511 cites W2098511189 @default.
- W1981352511 cites W4205788173 @default.
- W1981352511 doi "https://doi.org/10.4028/www.scientific.net/msf.679-680.286" @default.
- W1981352511 hasPublicationYear "2011" @default.
- W1981352511 type Work @default.
- W1981352511 sameAs 1981352511 @default.
- W1981352511 citedByCount "2" @default.
- W1981352511 countsByYear W19813525112012 @default.
- W1981352511 countsByYear W19813525112021 @default.
- W1981352511 crossrefType "journal-article" @default.
- W1981352511 hasAuthorship W1981352511A5017043130 @default.
- W1981352511 hasAuthorship W1981352511A5023839579 @default.
- W1981352511 hasAuthorship W1981352511A5025577408 @default.
- W1981352511 hasAuthorship W1981352511A5031711045 @default.
- W1981352511 hasAuthorship W1981352511A5048008812 @default.
- W1981352511 hasAuthorship W1981352511A5059311444 @default.
- W1981352511 hasAuthorship W1981352511A5077769295 @default.
- W1981352511 hasConcept C100460472 @default.
- W1981352511 hasConcept C111368507 @default.
- W1981352511 hasConcept C121332964 @default.
- W1981352511 hasConcept C127313418 @default.
- W1981352511 hasConcept C159122135 @default.
- W1981352511 hasConcept C159985019 @default.
- W1981352511 hasConcept C162307627 @default.
- W1981352511 hasConcept C192562407 @default.
- W1981352511 hasConcept C200239111 @default.
- W1981352511 hasConcept C200307862 @default.
- W1981352511 hasConcept C2524010 @default.
- W1981352511 hasConcept C2776799497 @default.
- W1981352511 hasConcept C2779227376 @default.
- W1981352511 hasConcept C2991782629 @default.
- W1981352511 hasConcept C33923547 @default.
- W1981352511 hasConcept C41008148 @default.
- W1981352511 hasConcept C46141821 @default.
- W1981352511 hasConcept C47701112 @default.
- W1981352511 hasConcept C49040817 @default.
- W1981352511 hasConcept C537208039 @default.
- W1981352511 hasConcept C62520636 @default.
- W1981352511 hasConcept C76155785 @default.
- W1981352511 hasConceptScore W1981352511C100460472 @default.
- W1981352511 hasConceptScore W1981352511C111368507 @default.
- W1981352511 hasConceptScore W1981352511C121332964 @default.
- W1981352511 hasConceptScore W1981352511C127313418 @default.
- W1981352511 hasConceptScore W1981352511C159122135 @default.
- W1981352511 hasConceptScore W1981352511C159985019 @default.
- W1981352511 hasConceptScore W1981352511C162307627 @default.
- W1981352511 hasConceptScore W1981352511C192562407 @default.
- W1981352511 hasConceptScore W1981352511C200239111 @default.
- W1981352511 hasConceptScore W1981352511C200307862 @default.
- W1981352511 hasConceptScore W1981352511C2524010 @default.
- W1981352511 hasConceptScore W1981352511C2776799497 @default.
- W1981352511 hasConceptScore W1981352511C2779227376 @default.
- W1981352511 hasConceptScore W1981352511C2991782629 @default.
- W1981352511 hasConceptScore W1981352511C33923547 @default.
- W1981352511 hasConceptScore W1981352511C41008148 @default.
- W1981352511 hasConceptScore W1981352511C46141821 @default.
- W1981352511 hasConceptScore W1981352511C47701112 @default.
- W1981352511 hasConceptScore W1981352511C49040817 @default.
- W1981352511 hasConceptScore W1981352511C537208039 @default.
- W1981352511 hasConceptScore W1981352511C62520636 @default.
- W1981352511 hasConceptScore W1981352511C76155785 @default.
- W1981352511 hasLocation W19813525111 @default.
- W1981352511 hasOpenAccess W1981352511 @default.
- W1981352511 hasPrimaryLocation W19813525111 @default.
- W1981352511 hasRelatedWork W1921487330 @default.
- W1981352511 hasRelatedWork W2030562991 @default.
- W1981352511 hasRelatedWork W2035738185 @default.
- W1981352511 hasRelatedWork W2040561209 @default.
- W1981352511 hasRelatedWork W2051938318 @default.
- W1981352511 hasRelatedWork W2317947914 @default.
- W1981352511 hasRelatedWork W2467368865 @default.
- W1981352511 hasRelatedWork W2786512790 @default.
- W1981352511 hasRelatedWork W2788210180 @default.
- W1981352511 hasRelatedWork W2955718321 @default.
- W1981352511 hasVolume "679-680" @default.
- W1981352511 isParatext "false" @default.
- W1981352511 isRetracted "false" @default.
- W1981352511 magId "1981352511" @default.
- W1981352511 workType "article" @default.