Matches in SemOpenAlex for { <https://semopenalex.org/work/W1981482856> ?p ?o ?g. }
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88
with 100 items per page.
- W1981482856 endingPage "251" @default.
- W1981482856 startingPage "237" @default.
- W1981482856 abstract "A dynamic 3D nano-scale surface profilometer using stroboscopic white-light interferometry with novel signal deconvolution was developed to deliver dynamic surface profilometry with a measurement bandwidth of up to a MHz scale and a vertical resolution reaching 1 nm. Previous work using stroboscopic microscopic interferometry for dynamic characterization of micro-(opto)electromechanical systems (M(O)EMS) has been limited in measurement bandwidth of less than a few hundred kHz due to physical length limitation of stroboscopic light. For high-resonance mode analysis, the stroboscopic light pulse is too lengthy to capture the moving fringes from dynamic motion of the detected structure. In view of this need, a novel deconvolution algorithm using correction of the light response was developed for removing potential image blurs caused by the unavoidable vibration of the tested parts. With this advance in technology, the bandwidth of dynamic measurement can be significantly increased without sacrificing measurement accuracy. A microcantilever beam used in AFM was measured to verify the capability of the system in accurate characterization of dynamic behaviors of M(O)EMS." @default.
- W1981482856 created "2016-06-24" @default.
- W1981482856 creator A5008794345 @default.
- W1981482856 creator A5020766727 @default.
- W1981482856 creator A5039311553 @default.
- W1981482856 creator A5051025874 @default.
- W1981482856 creator A5091279923 @default.
- W1981482856 date "2009-02-01" @default.
- W1981482856 modified "2023-09-25" @default.
- W1981482856 title "Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm" @default.
- W1981482856 cites W1966861490 @default.
- W1981482856 cites W1994893200 @default.
- W1981482856 cites W2003955564 @default.
- W1981482856 cites W2004485981 @default.
- W1981482856 cites W2025339030 @default.
- W1981482856 cites W2149218247 @default.
- W1981482856 cites W2159118526 @default.
- W1981482856 doi "https://doi.org/10.1016/j.optlaseng.2008.05.016" @default.
- W1981482856 hasPublicationYear "2009" @default.
- W1981482856 type Work @default.
- W1981482856 sameAs 1981482856 @default.
- W1981482856 citedByCount "25" @default.
- W1981482856 countsByYear W19814828562013 @default.
- W1981482856 countsByYear W19814828562014 @default.
- W1981482856 countsByYear W19814828562015 @default.
- W1981482856 countsByYear W19814828562017 @default.
- W1981482856 countsByYear W19814828562018 @default.
- W1981482856 countsByYear W19814828562019 @default.
- W1981482856 countsByYear W19814828562020 @default.
- W1981482856 countsByYear W19814828562022 @default.
- W1981482856 countsByYear W19814828562023 @default.
- W1981482856 crossrefType "journal-article" @default.
- W1981482856 hasAuthorship W1981482856A5008794345 @default.
- W1981482856 hasAuthorship W1981482856A5020766727 @default.
- W1981482856 hasAuthorship W1981482856A5039311553 @default.
- W1981482856 hasAuthorship W1981482856A5051025874 @default.
- W1981482856 hasAuthorship W1981482856A5091279923 @default.
- W1981482856 hasConcept C107365816 @default.
- W1981482856 hasConcept C120665830 @default.
- W1981482856 hasConcept C121332964 @default.
- W1981482856 hasConcept C159985019 @default.
- W1981482856 hasConcept C166689943 @default.
- W1981482856 hasConcept C174576160 @default.
- W1981482856 hasConcept C192562407 @default.
- W1981482856 hasConcept C2776257435 @default.
- W1981482856 hasConcept C37977207 @default.
- W1981482856 hasConcept C41008148 @default.
- W1981482856 hasConcept C44403416 @default.
- W1981482856 hasConcept C49040817 @default.
- W1981482856 hasConcept C76155785 @default.
- W1981482856 hasConcept C79261456 @default.
- W1981482856 hasConcept C87133666 @default.
- W1981482856 hasConceptScore W1981482856C107365816 @default.
- W1981482856 hasConceptScore W1981482856C120665830 @default.
- W1981482856 hasConceptScore W1981482856C121332964 @default.
- W1981482856 hasConceptScore W1981482856C159985019 @default.
- W1981482856 hasConceptScore W1981482856C166689943 @default.
- W1981482856 hasConceptScore W1981482856C174576160 @default.
- W1981482856 hasConceptScore W1981482856C192562407 @default.
- W1981482856 hasConceptScore W1981482856C2776257435 @default.
- W1981482856 hasConceptScore W1981482856C37977207 @default.
- W1981482856 hasConceptScore W1981482856C41008148 @default.
- W1981482856 hasConceptScore W1981482856C44403416 @default.
- W1981482856 hasConceptScore W1981482856C49040817 @default.
- W1981482856 hasConceptScore W1981482856C76155785 @default.
- W1981482856 hasConceptScore W1981482856C79261456 @default.
- W1981482856 hasConceptScore W1981482856C87133666 @default.
- W1981482856 hasIssue "2" @default.
- W1981482856 hasLocation W19814828561 @default.
- W1981482856 hasOpenAccess W1981482856 @default.
- W1981482856 hasPrimaryLocation W19814828561 @default.
- W1981482856 hasRelatedWork W2023676340 @default.
- W1981482856 hasRelatedWork W2026599092 @default.
- W1981482856 hasRelatedWork W2057810078 @default.
- W1981482856 hasRelatedWork W2060077273 @default.
- W1981482856 hasRelatedWork W2064990003 @default.
- W1981482856 hasRelatedWork W2065294548 @default.
- W1981482856 hasRelatedWork W2077020570 @default.
- W1981482856 hasRelatedWork W2141088509 @default.
- W1981482856 hasRelatedWork W3017122893 @default.
- W1981482856 hasRelatedWork W3170826586 @default.
- W1981482856 hasVolume "47" @default.
- W1981482856 isParatext "false" @default.
- W1981482856 isRetracted "false" @default.
- W1981482856 magId "1981482856" @default.
- W1981482856 workType "article" @default.