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- W1981649704 abstract "Single-crystal MgO and SrTiO3 substrates have been raised to temperatures suitable for deposition and in situ annealing of high-Tc superconducting thin films by the absorption of 10.6 mu m laser radiation. Steady-state temperature control in vacuum and low-pressure oxygen was achieved by varying the mark-space ratio of the RF-excited CO2 laser heater source. This approach allows high temperatures (>or=950 K) to be achieved with relatively low power input (<or=30 W) and maintains deposition chamber cleanliness." @default.
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- W1981649704 date "1990-09-01" @default.
- W1981649704 modified "2023-09-23" @default.
- W1981649704 title "A CW CO<sub>2</sub>laser substrate heater for superconducting thin-film deposition" @default.
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- W1981649704 doi "https://doi.org/10.1088/0953-2048/3/9/009" @default.
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