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- W1981703772 abstract "Examples of using SOI materials for formation of novel sensor and actuator structures at Chalmers University of Technology are given. Using SOI material gives advantages in formation of sensor and actuator structures, such as a nanoindentation force sensor, a three-axis accelerometer, a miniaturized pinball game and integration of diffractive optical elements onto silicon." @default.
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- W1981703772 date "2006-05-01" @default.
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- W1981703772 title "Sensors and actuators based on SOI materials" @default.
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- W1981703772 doi "https://doi.org/10.1016/j.sse.2006.04.026" @default.
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