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- W1981714549 abstract "Exposure tools for 193nm lithography are expected to use Argon-Fluoride lasers at repetition rates of at least 2kHz. We are showing that, by revisiting several key technologies, the performance and reliability of ArF lasers at 2 kHz are trending towards a level comparable to KrF lasers." @default.
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- W1981714549 date "2000-07-05" @default.
- W1981714549 modified "2023-09-27" @default.
- W1981714549 title "Comparison of ArF and KrF laser performance at 2 kHz for microlithography" @default.
- W1981714549 doi "https://doi.org/10.1117/12.388986" @default.
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