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• W1981783647 endingPage "025032" @default.
• W1981783647 startingPage "025032" @default.
• W1981783647 abstract "This paper presents measurements of electron density (ne0), electron temperature (Te), and electronegativity (α) in electron beam-generated plasmas produced in mixtures of argon and SF6 using Langmuir probes and plasma resonance spectroscopy. Langmuir probe measurements are analyzed using a model capable of handling multi-component plasmas with both positive and negative ions. Verification of the model is provided through plasma frequency resonance measurements of ne0. The results suggest a simple approach to ascertaining α in negative-ioncontaining plasmas using Langmuir probes alone. In addition, modest amounts of SF6 are shown to produce sharp increases in both Te and α in electron beam generated plasmas." @default.
• W1981783647 created "2016-06-24" @default.
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• W1981783647 date "2015-04-07" @default.
• W1981783647 modified "2023-10-14" @default.
• W1981783647 title "Measuring the electron density, temperature, and electronegativity in electron beam-generated plasmas produced in argon/SF₆mixtures" @default.
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• W1981783647 doi "https://doi.org/10.1088/0963-0252/24/2/025032" @default.
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