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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1981829985> ?p ?o ?g. }

• W1981829985 abstract "A new technique for directly fabricating patterned thin films (&lt;1μm thick) of fully single-crystal strontium titanate uses deep H+ implantation into the oxide sample, followed by anodic bonding of the sample to a Pyrex or Pyrex-on-Si substrate. The dielectric properties and crystal structure of such thin films are characterized and are found to be essentially those of the bulk single crystal." @default.
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• W1981829985 date "2006-09-18" @default.
• W1981829985 modified "2023-09-26" @default.
• W1981829985 title "Fabrication of patterned single-crystal SrTiO3 thin films by ion slicing and anodic bonding" @default.
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• W1981829985 doi "https://doi.org/10.1063/1.2355457" @default.
• W1981829985 hasPublicationYear "2006" @default.
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