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- W1982000082 abstract "Through-silicon vias (TSV) are important for wafer level packaging (WLP) as they provide patterning holes through thick silicon dies to integrate and interconnect devices which are stacked in z-direction. For economic processing TSV fabrication primarily needs to be cost-effective including especially a high throughput. Furthermore, a lithography process for TSV has to be stable enough to allow patterning on pre-structured substrates with inhomogeneous topography. This can be addressed by an exposure process which offers a large depth of focus. We have developed a mask-aligner lithography process based on the use of a double-sided photomask to realize aerial images which meet these constraints." @default.
- W1982000082 created "2016-06-24" @default.
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- W1982000082 creator A5043801104 @default.
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- W1982000082 date "2015-03-13" @default.
- W1982000082 modified "2023-09-23" @default.
- W1982000082 title "Mask aligner lithography for TSV-structures using a double-sided (structured) photomask" @default.
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- W1982000082 doi "https://doi.org/10.1117/12.2077550" @default.
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