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- W1982034338 abstract "The ability to control critical dimensions of structures on semiconductor devices is paramount to improving die yield and device performance. Historical methods of controlling critical dimensions include; tool matching, limiting processes to a limited tool set, and extensive monitoring. These methods have proven reasonably effective in controlling critical dimensions, but they are labor and resource intensive. The next level of factory performance is to automate corrections and drive critical dimensions to target. Use of this type of control, commonly referred to as Advanced Process Control (APC) has been a trend that is increasingly becoming the norm in our industry. This paper outlines the implementation of a controller that effectively targets Final Inspection Critical Dimensions (FICD's). This is accomplished by feeding Develop Inspection Critical Dimensions (DICD), FICD, chip code and chamber information in to a model. The controller makes use of a model to make recommendations for recipe parameters. These recipe parameters are transferred to the tool using XML protocol in an automated fashion. Offsets and disturbances are effectively adjusted for. This controller has been implemented in a production facility and has resulted in a 70 % improvement in Cpk performance." @default.
- W1982034338 created "2016-06-24" @default.
- W1982034338 creator A5085288346 @default.
- W1982034338 date "2006-03-10" @default.
- W1982034338 modified "2023-09-26" @default.
- W1982034338 title "Advanced process control of poly silicon gate critical dimensions" @default.
- W1982034338 doi "https://doi.org/10.1117/12.658860" @default.
- W1982034338 hasPublicationYear "2006" @default.
- W1982034338 type Work @default.
- W1982034338 sameAs 1982034338 @default.
- W1982034338 citedByCount "0" @default.
- W1982034338 crossrefType "proceedings-article" @default.
- W1982034338 hasAuthorship W1982034338A5085288346 @default.
- W1982034338 hasConcept C111919701 @default.
- W1982034338 hasConcept C115901376 @default.
- W1982034338 hasConcept C117671659 @default.
- W1982034338 hasConcept C127413603 @default.
- W1982034338 hasConcept C149635348 @default.
- W1982034338 hasConcept C155386361 @default.
- W1982034338 hasConcept C165005293 @default.
- W1982034338 hasConcept C199360897 @default.
- W1982034338 hasConcept C200601418 @default.
- W1982034338 hasConcept C203479927 @default.
- W1982034338 hasConcept C37374048 @default.
- W1982034338 hasConcept C40149104 @default.
- W1982034338 hasConcept C41008148 @default.
- W1982034338 hasConcept C6557445 @default.
- W1982034338 hasConcept C76155785 @default.
- W1982034338 hasConcept C78519656 @default.
- W1982034338 hasConcept C86803240 @default.
- W1982034338 hasConcept C98045186 @default.
- W1982034338 hasConceptScore W1982034338C111919701 @default.
- W1982034338 hasConceptScore W1982034338C115901376 @default.
- W1982034338 hasConceptScore W1982034338C117671659 @default.
- W1982034338 hasConceptScore W1982034338C127413603 @default.
- W1982034338 hasConceptScore W1982034338C149635348 @default.
- W1982034338 hasConceptScore W1982034338C155386361 @default.
- W1982034338 hasConceptScore W1982034338C165005293 @default.
- W1982034338 hasConceptScore W1982034338C199360897 @default.
- W1982034338 hasConceptScore W1982034338C200601418 @default.
- W1982034338 hasConceptScore W1982034338C203479927 @default.
- W1982034338 hasConceptScore W1982034338C37374048 @default.
- W1982034338 hasConceptScore W1982034338C40149104 @default.
- W1982034338 hasConceptScore W1982034338C41008148 @default.
- W1982034338 hasConceptScore W1982034338C6557445 @default.
- W1982034338 hasConceptScore W1982034338C76155785 @default.
- W1982034338 hasConceptScore W1982034338C78519656 @default.
- W1982034338 hasConceptScore W1982034338C86803240 @default.
- W1982034338 hasConceptScore W1982034338C98045186 @default.
- W1982034338 hasLocation W19820343381 @default.
- W1982034338 hasOpenAccess W1982034338 @default.
- W1982034338 hasPrimaryLocation W19820343381 @default.
- W1982034338 hasRelatedWork W1965096282 @default.
- W1982034338 hasRelatedWork W1997915195 @default.
- W1982034338 hasRelatedWork W2149188425 @default.
- W1982034338 hasRelatedWork W2724479145 @default.
- W1982034338 hasRelatedWork W2730127954 @default.
- W1982034338 hasRelatedWork W2732457698 @default.
- W1982034338 hasRelatedWork W2732589464 @default.
- W1982034338 hasRelatedWork W2734254788 @default.
- W1982034338 hasRelatedWork W372200913 @default.
- W1982034338 hasRelatedWork W4235574864 @default.
- W1982034338 isParatext "false" @default.
- W1982034338 isRetracted "false" @default.
- W1982034338 magId "1982034338" @default.
- W1982034338 workType "article" @default.