Matches in SemOpenAlex for { <https://semopenalex.org/work/W1982062003> ?p ?o ?g. }
- W1982062003 endingPage "1407" @default.
- W1982062003 startingPage "1396" @default.
- W1982062003 abstract "We present a nanoelectromechanical system piezoresistive pressure sensor with annular grooves on the circular diaphragm where silicon nanowires (SiNWs) are embedded as sensing elements around the edge. In comparison with our previous flat diaphragm pressure sensor, this new diaphragm structure enhances the device sensitivity by 2.5 times under pressure range of 0-120 mmHg. By leveraging SiNWs as piezoresistors, this improvement is even remarkable in contrast to other recently reported piezoresistive pressure sensing devices. In addition, with the miniaturized sensing diaphragm (radius of 100 μm) the sensor can be potentially used as implantable device for low-pressure sensing applications." @default.
- W1982062003 created "2016-06-24" @default.
- W1982062003 creator A5023470246 @default.
- W1982062003 creator A5028678061 @default.
- W1982062003 creator A5033553559 @default.
- W1982062003 creator A5041123909 @default.
- W1982062003 creator A5077967364 @default.
- W1982062003 creator A5084452777 @default.
- W1982062003 creator A5085142676 @default.
- W1982062003 date "2014-12-01" @default.
- W1982062003 modified "2023-10-11" @default.
- W1982062003 title "Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application" @default.
- W1982062003 cites W1965073374 @default.
- W1982062003 cites W1974302073 @default.
- W1982062003 cites W1974366079 @default.
- W1982062003 cites W1974978401 @default.
- W1982062003 cites W1975455962 @default.
- W1982062003 cites W1978200671 @default.
- W1982062003 cites W1978204108 @default.
- W1982062003 cites W1980666831 @default.
- W1982062003 cites W1981156881 @default.
- W1982062003 cites W1991426380 @default.
- W1982062003 cites W2002044424 @default.
- W1982062003 cites W2002257666 @default.
- W1982062003 cites W2005602423 @default.
- W1982062003 cites W2006014354 @default.
- W1982062003 cites W2006391643 @default.
- W1982062003 cites W2007214647 @default.
- W1982062003 cites W2011215557 @default.
- W1982062003 cites W2012328822 @default.
- W1982062003 cites W2017366838 @default.
- W1982062003 cites W2019068752 @default.
- W1982062003 cites W2019842635 @default.
- W1982062003 cites W2020766868 @default.
- W1982062003 cites W2021683162 @default.
- W1982062003 cites W2023759381 @default.
- W1982062003 cites W2031960932 @default.
- W1982062003 cites W2032282517 @default.
- W1982062003 cites W2038111283 @default.
- W1982062003 cites W2038305545 @default.
- W1982062003 cites W2048616414 @default.
- W1982062003 cites W2049080090 @default.
- W1982062003 cites W2050061454 @default.
- W1982062003 cites W2050196498 @default.
- W1982062003 cites W2061454740 @default.
- W1982062003 cites W2063263662 @default.
- W1982062003 cites W2063657045 @default.
- W1982062003 cites W2066652216 @default.
- W1982062003 cites W2068216833 @default.
- W1982062003 cites W2069655806 @default.
- W1982062003 cites W2071994966 @default.
- W1982062003 cites W2078480331 @default.
- W1982062003 cites W2078590787 @default.
- W1982062003 cites W2078976151 @default.
- W1982062003 cites W2092423884 @default.
- W1982062003 cites W2095324679 @default.
- W1982062003 cites W2103583523 @default.
- W1982062003 cites W2106302020 @default.
- W1982062003 cites W2109470307 @default.
- W1982062003 cites W2109513073 @default.
- W1982062003 cites W2110357888 @default.
- W1982062003 cites W2113285583 @default.
- W1982062003 cites W2115489808 @default.
- W1982062003 cites W2116124910 @default.
- W1982062003 cites W2120255193 @default.
- W1982062003 cites W2121093563 @default.
- W1982062003 cites W2137178805 @default.
- W1982062003 cites W2145290985 @default.
- W1982062003 cites W2155605920 @default.
- W1982062003 cites W2156171928 @default.
- W1982062003 cites W2159233708 @default.
- W1982062003 cites W2164701373 @default.
- W1982062003 cites W2169679126 @default.
- W1982062003 cites W4244614260 @default.
- W1982062003 cites W4253020066 @default.
- W1982062003 doi "https://doi.org/10.1109/jmems.2014.2313635" @default.
- W1982062003 hasPublicationYear "2014" @default.
- W1982062003 type Work @default.
- W1982062003 sameAs 1982062003 @default.
- W1982062003 citedByCount "33" @default.
- W1982062003 countsByYear W19820620032015 @default.
- W1982062003 countsByYear W19820620032016 @default.
- W1982062003 countsByYear W19820620032017 @default.
- W1982062003 countsByYear W19820620032018 @default.
- W1982062003 countsByYear W19820620032019 @default.
- W1982062003 countsByYear W19820620032020 @default.
- W1982062003 countsByYear W19820620032021 @default.
- W1982062003 countsByYear W19820620032022 @default.
- W1982062003 countsByYear W19820620032023 @default.
- W1982062003 crossrefType "journal-article" @default.
- W1982062003 hasAuthorship W1982062003A5023470246 @default.
- W1982062003 hasAuthorship W1982062003A5028678061 @default.
- W1982062003 hasAuthorship W1982062003A5033553559 @default.
- W1982062003 hasAuthorship W1982062003A5041123909 @default.
- W1982062003 hasAuthorship W1982062003A5077967364 @default.
- W1982062003 hasAuthorship W1982062003A5084452777 @default.
- W1982062003 hasAuthorship W1982062003A5085142676 @default.
- W1982062003 hasConcept C121332964 @default.