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- W1982186785 abstract "This study focuses on the characterization of silicon dioxide (SiO 2 ) layers, either thermally grown or deposited on trenched 100 mm 4H-silicon carbide (SiC) wafers. We evaluate the electrical properties of silicon dioxide as a gate oxide (GOX) for 3D metal oxide semiconductor (MOS) devices, such as Trench-MOSFETs. Interface state densities ( D IT ) of 1 * 10 11 cm -2 eV -1 under flat band conditions were determined using the hi-lo CV-method [1]. Furthermore, current-electric field strength (IE) measurements have been performed and are discussed. Trench-MOS structures exhibited dielectric breakdown field strengths up to 10 MV/cm." @default.
- W1982186785 created "2016-06-24" @default.
- W1982186785 creator A5004241832 @default.
- W1982186785 creator A5020492083 @default.
- W1982186785 creator A5048880686 @default.
- W1982186785 creator A5052437100 @default.
- W1982186785 creator A5060500986 @default.
- W1982186785 date "2013-01-01" @default.
- W1982186785 modified "2023-09-27" @default.
- W1982186785 title "Characterization of Diverse Gate Oxides on 4H-SiC 3D Trench-MOS Structures" @default.
- W1982186785 cites W1963970991 @default.
- W1982186785 cites W2034525911 @default.
- W1982186785 cites W2108246359 @default.
- W1982186785 cites W2499844158 @default.
- W1982186785 cites W651784078 @default.
- W1982186785 doi "https://doi.org/10.4028/www.scientific.net/msf.740-742.691" @default.
- W1982186785 hasPublicationYear "2013" @default.
- W1982186785 type Work @default.
- W1982186785 sameAs 1982186785 @default.
- W1982186785 citedByCount "6" @default.
- W1982186785 countsByYear W19821867852014 @default.
- W1982186785 countsByYear W19821867852018 @default.
- W1982186785 countsByYear W19821867852020 @default.
- W1982186785 countsByYear W19821867852021 @default.
- W1982186785 countsByYear W19821867852022 @default.
- W1982186785 crossrefType "journal-article" @default.
- W1982186785 hasAuthorship W1982186785A5004241832 @default.
- W1982186785 hasAuthorship W1982186785A5020492083 @default.
- W1982186785 hasAuthorship W1982186785A5048880686 @default.
- W1982186785 hasAuthorship W1982186785A5052437100 @default.
- W1982186785 hasAuthorship W1982186785A5060500986 @default.
- W1982186785 hasConcept C119599485 @default.
- W1982186785 hasConcept C127413603 @default.
- W1982186785 hasConcept C133386390 @default.
- W1982186785 hasConcept C155310634 @default.
- W1982186785 hasConcept C159985019 @default.
- W1982186785 hasConcept C160671074 @default.
- W1982186785 hasConcept C165801399 @default.
- W1982186785 hasConcept C171250308 @default.
- W1982186785 hasConcept C172385210 @default.
- W1982186785 hasConcept C191897082 @default.
- W1982186785 hasConcept C192562407 @default.
- W1982186785 hasConcept C2361726 @default.
- W1982186785 hasConcept C2778413303 @default.
- W1982186785 hasConcept C2779089622 @default.
- W1982186785 hasConcept C2779227376 @default.
- W1982186785 hasConcept C2779851234 @default.
- W1982186785 hasConcept C2780722187 @default.
- W1982186785 hasConcept C2780841128 @default.
- W1982186785 hasConcept C49040817 @default.
- W1982186785 hasConcept C544956773 @default.
- W1982186785 hasConcept C70401718 @default.
- W1982186785 hasConceptScore W1982186785C119599485 @default.
- W1982186785 hasConceptScore W1982186785C127413603 @default.
- W1982186785 hasConceptScore W1982186785C133386390 @default.
- W1982186785 hasConceptScore W1982186785C155310634 @default.
- W1982186785 hasConceptScore W1982186785C159985019 @default.
- W1982186785 hasConceptScore W1982186785C160671074 @default.
- W1982186785 hasConceptScore W1982186785C165801399 @default.
- W1982186785 hasConceptScore W1982186785C171250308 @default.
- W1982186785 hasConceptScore W1982186785C172385210 @default.
- W1982186785 hasConceptScore W1982186785C191897082 @default.
- W1982186785 hasConceptScore W1982186785C192562407 @default.
- W1982186785 hasConceptScore W1982186785C2361726 @default.
- W1982186785 hasConceptScore W1982186785C2778413303 @default.
- W1982186785 hasConceptScore W1982186785C2779089622 @default.
- W1982186785 hasConceptScore W1982186785C2779227376 @default.
- W1982186785 hasConceptScore W1982186785C2779851234 @default.
- W1982186785 hasConceptScore W1982186785C2780722187 @default.
- W1982186785 hasConceptScore W1982186785C2780841128 @default.
- W1982186785 hasConceptScore W1982186785C49040817 @default.
- W1982186785 hasConceptScore W1982186785C544956773 @default.
- W1982186785 hasConceptScore W1982186785C70401718 @default.
- W1982186785 hasLocation W19821867851 @default.
- W1982186785 hasOpenAccess W1982186785 @default.
- W1982186785 hasPrimaryLocation W19821867851 @default.
- W1982186785 hasRelatedWork W1581431378 @default.
- W1982186785 hasRelatedWork W1996765809 @default.
- W1982186785 hasRelatedWork W2018412066 @default.
- W1982186785 hasRelatedWork W2025031261 @default.
- W1982186785 hasRelatedWork W2036433132 @default.
- W1982186785 hasRelatedWork W2052779355 @default.
- W1982186785 hasRelatedWork W2086320358 @default.
- W1982186785 hasRelatedWork W2119217122 @default.
- W1982186785 hasRelatedWork W2157216836 @default.
- W1982186785 hasRelatedWork W2158577335 @default.
- W1982186785 hasRelatedWork W2208759677 @default.
- W1982186785 hasRelatedWork W2355831642 @default.
- W1982186785 hasRelatedWork W2612735426 @default.
- W1982186785 hasRelatedWork W2905291209 @default.
- W1982186785 hasRelatedWork W2979450882 @default.
- W1982186785 hasRelatedWork W3046180963 @default.
- W1982186785 hasRelatedWork W3084290315 @default.
- W1982186785 hasRelatedWork W3106718337 @default.
- W1982186785 hasRelatedWork W2138337916 @default.
- W1982186785 hasRelatedWork W2845407757 @default.
- W1982186785 isParatext "false" @default.
- W1982186785 isRetracted "false" @default.
- W1982186785 magId "1982186785" @default.
- W1982186785 workType "article" @default.