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• W1982257129 abstract "The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zrx,Ti1 − x)O3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 μm thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles." @default.
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• W1982257129 date "1998-01-01" @default.
• W1982257129 modified "2023-10-01" @default.
• W1982257129 title "Ultrasonic flexural Lamb-wave actuators based on PZT thin film" @default.
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• W1982257129 doi "https://doi.org/10.1016/s0924-4247(98)80056-3" @default.
• W1982257129 hasPublicationYear "1998" @default.
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