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- W1982433574 abstract "The necessary information for geometric modeling of MEMS consists of a mask layout file and a process definition file. CIF and GDSII are commonly accepted formats for the mask layout file. However, there are no standard ways to express the process definition file. In this paper, we propose an XML (Extensible Markup Language) data model to describe the process definition file for geometric modeling of surface-micro-machined MEMS. This model has been incorporated in our CAD system. The results of implementation show that the XML approach not only facilitates the development of applications but also helps the exchange of information." @default.
- W1982433574 created "2016-06-24" @default.
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- W1982433574 date "2002-04-19" @default.
- W1982433574 modified "2023-09-23" @default.
- W1982433574 title "<title>Application of XML to geometric modeling of MEMS</title>" @default.
- W1982433574 doi "https://doi.org/10.1117/12.462810" @default.
- W1982433574 hasPublicationYear "2002" @default.
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