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- W1982481713 abstract "We present maskless, laser-based high precision micromachining processes for flexible device development and fabrication. Cutting of complex geometries into thin plates, selective removal of thin films or local deposition of thin films can be done with minor changes in the system set-up. All the techniques are based on the use of a femtosecond Ti:Sapphire laser system with a pulse length shorter than 10 ps. A new design concept for microdevices which uses this laser-based fast development technique will be discussed. Various manipulators for microparts consisting of several functional elements which are piled up will be demonstrated." @default.
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- W1982481713 date "1999-04-01" @default.
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- W1982481713 title "Femtosecond laser-based technology for fast development of micromechanical devices" @default.
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- W1982481713 doi "https://doi.org/10.1016/s0924-4247(98)00333-1" @default.
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