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• W1982485790 abstract "This paper gives insight into nanorobotic handling and electrical characterization of silicon nanowires (SiNWs) inside a scanning electron microscope. The synthesis of metal-assisted etched both end doped SiNWs is presented. Several nanorobotic pick and place strategies for handling individual nanowires are discussed. Key approaches such as force-based and adhesive bonding (focus ion and electron beam induced deposition) have been realized experimentally and evaluated toward their suitability for automation. Preliminary results on electrical characterization are presented." @default.
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• W1982485790 date "2013-06-01" @default.
• W1982485790 modified "2023-09-25" @default.
• W1982485790 title "Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires" @default.
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• W1982485790 doi "https://doi.org/10.1109/tmech.2012.2193591" @default.
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