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- W1982485941 abstract "A microwave plasma torch was operated in a chamber at a reduced pressure, and the properties of the torch plasma were investigated. The argon torch plasma at a reduced pressure of 150Torr was observed to be well diffused in the discharge tube instead of the filamentary structures at the atmospheric pressure. The typical torch plasma density and electron temperature are measured to be ne=2×1014∕cm3 and Te=1.5eV, respectively, for argon plasmas at 150Torr. It was also found that the microwave plasma torch at a low pressure may efficiently produce chemical radicals." @default.
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- W1982485941 date "2008-08-04" @default.
- W1982485941 modified "2023-10-10" @default.
- W1982485941 title "Microwave plasma torch operating in a chamber at a low pressure" @default.
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- W1982485941 doi "https://doi.org/10.1063/1.2965459" @default.
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