Matches in SemOpenAlex for { <https://semopenalex.org/work/W1982504927> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W1982504927 endingPage "411" @default.
- W1982504927 startingPage "401" @default.
- W1982504927 abstract "Abstract The fabrication of photomasks for integrated optical (i.o.) components presents the particular difficulty of an extreme aspect ratio. It is shown that this problem can often be solved by a synthesizing procedure using a photorepeater. This method is demonstrated for two different versions of i.o. directional couplers (total length 20 mm, width of waveguides 3 μ, width of coupling gap between waveguides 3 μ). Single characteristic parts of the masks, which are composed on the reticle, are joined together by a step-and-repeat process. Residual imperfections of junctions can be neglected for diffused waveguides. Further advantages of the method (constant width of the waveguide and of the separating gap along the total length) are explained. Finally, the i.o. directional couplers produced are examined, and some of their characteristic parameters are described." @default.
- W1982504927 created "2016-06-24" @default.
- W1982504927 creator A5018713767 @default.
- W1982504927 creator A5026352286 @default.
- W1982504927 creator A5053357457 @default.
- W1982504927 date "1981-01-01" @default.
- W1982504927 modified "2023-10-18" @default.
- W1982504927 title "Implementation of photomasks for guided wave optical components by a step-and-repeat process" @default.
- W1982504927 cites W2033801682 @default.
- W1982504927 cites W2041897718 @default.
- W1982504927 cites W2110266546 @default.
- W1982504927 doi "https://doi.org/10.1080/01468038108203230" @default.
- W1982504927 hasPublicationYear "1981" @default.
- W1982504927 type Work @default.
- W1982504927 sameAs 1982504927 @default.
- W1982504927 citedByCount "0" @default.
- W1982504927 crossrefType "journal-article" @default.
- W1982504927 hasAuthorship W1982504927A5018713767 @default.
- W1982504927 hasAuthorship W1982504927A5026352286 @default.
- W1982504927 hasAuthorship W1982504927A5053357457 @default.
- W1982504927 hasConcept C105487726 @default.
- W1982504927 hasConcept C111919701 @default.
- W1982504927 hasConcept C120665830 @default.
- W1982504927 hasConcept C121332964 @default.
- W1982504927 hasConcept C131584629 @default.
- W1982504927 hasConcept C136525101 @default.
- W1982504927 hasConcept C142724271 @default.
- W1982504927 hasConcept C146617872 @default.
- W1982504927 hasConcept C14737013 @default.
- W1982504927 hasConcept C160671074 @default.
- W1982504927 hasConcept C171250308 @default.
- W1982504927 hasConcept C191897082 @default.
- W1982504927 hasConcept C192562407 @default.
- W1982504927 hasConcept C199360897 @default.
- W1982504927 hasConcept C200687136 @default.
- W1982504927 hasConcept C204787440 @default.
- W1982504927 hasConcept C2777027219 @default.
- W1982504927 hasConcept C2779227376 @default.
- W1982504927 hasConcept C41008148 @default.
- W1982504927 hasConcept C49040817 @default.
- W1982504927 hasConcept C53524968 @default.
- W1982504927 hasConcept C71924100 @default.
- W1982504927 hasConcept C98045186 @default.
- W1982504927 hasConceptScore W1982504927C105487726 @default.
- W1982504927 hasConceptScore W1982504927C111919701 @default.
- W1982504927 hasConceptScore W1982504927C120665830 @default.
- W1982504927 hasConceptScore W1982504927C121332964 @default.
- W1982504927 hasConceptScore W1982504927C131584629 @default.
- W1982504927 hasConceptScore W1982504927C136525101 @default.
- W1982504927 hasConceptScore W1982504927C142724271 @default.
- W1982504927 hasConceptScore W1982504927C146617872 @default.
- W1982504927 hasConceptScore W1982504927C14737013 @default.
- W1982504927 hasConceptScore W1982504927C160671074 @default.
- W1982504927 hasConceptScore W1982504927C171250308 @default.
- W1982504927 hasConceptScore W1982504927C191897082 @default.
- W1982504927 hasConceptScore W1982504927C192562407 @default.
- W1982504927 hasConceptScore W1982504927C199360897 @default.
- W1982504927 hasConceptScore W1982504927C200687136 @default.
- W1982504927 hasConceptScore W1982504927C204787440 @default.
- W1982504927 hasConceptScore W1982504927C2777027219 @default.
- W1982504927 hasConceptScore W1982504927C2779227376 @default.
- W1982504927 hasConceptScore W1982504927C41008148 @default.
- W1982504927 hasConceptScore W1982504927C49040817 @default.
- W1982504927 hasConceptScore W1982504927C53524968 @default.
- W1982504927 hasConceptScore W1982504927C71924100 @default.
- W1982504927 hasConceptScore W1982504927C98045186 @default.
- W1982504927 hasIssue "4" @default.
- W1982504927 hasLocation W19825049271 @default.
- W1982504927 hasOpenAccess W1982504927 @default.
- W1982504927 hasPrimaryLocation W19825049271 @default.
- W1982504927 hasRelatedWork W1986705012 @default.
- W1982504927 hasRelatedWork W2011817487 @default.
- W1982504927 hasRelatedWork W2030106306 @default.
- W1982504927 hasRelatedWork W2055475127 @default.
- W1982504927 hasRelatedWork W2132917903 @default.
- W1982504927 hasRelatedWork W2180717591 @default.
- W1982504927 hasRelatedWork W2535048350 @default.
- W1982504927 hasRelatedWork W2585400059 @default.
- W1982504927 hasRelatedWork W2601057755 @default.
- W1982504927 hasRelatedWork W3112362275 @default.
- W1982504927 hasVolume "3" @default.
- W1982504927 isParatext "false" @default.
- W1982504927 isRetracted "false" @default.
- W1982504927 magId "1982504927" @default.
- W1982504927 workType "article" @default.