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- W1982525317 abstract "Abstract A highly sensitive spectrophotometric technique is described for the calibration of a digital thickness monitor (DTM) mounted in an electron beam evaporator. The DTM was found to have a systematic error of 12% for the production of Nb films 700 to 1200 A thick." @default.
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- W1982525317 date "1985-03-01" @default.
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- W1982525317 title "Calibration method for a digital thickness monitor" @default.
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- W1982525317 doi "https://doi.org/10.1016/0167-577x(85)90152-1" @default.
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