Matches in SemOpenAlex for { <https://semopenalex.org/work/W1982562020> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W1982562020 endingPage "1797" @default.
- W1982562020 startingPage "1794" @default.
- W1982562020 abstract "In this paper, we report on the realization of miniaturized projection displays on silicon substrates using a highly programmable deep reactive ion etching technique. The micro-machined silicon substrates have been used to incorporate Liionic electro-chromic solutions. The use of tungsten oxide (WO3) in conjunction with the ITO electrodes, leads to a transparent or opaque interfaces which can be used as a method to distinguish different spots in an image, provided an external light source is exploited. The formation of highly complex three-dimensional structures is feasible during the deep reactive ion etching of silicon wafers, while desired under-etching is achieved by controlling the etching parameters. The evolution of cup-like micro-mirrors can be carried out at micrometer sizes leading to ultra-high resolution projection systems. A passive addressing is feasible between the top ITO-lines placed on a glass substrate and the bottom cavity-holding substrate. By addressing individual or clusters of pixels one can achieve desired images." @default.
- W1982562020 created "2016-06-24" @default.
- W1982562020 creator A5025552373 @default.
- W1982562020 creator A5071432172 @default.
- W1982562020 creator A5078426512 @default.
- W1982562020 date "2011-06-01" @default.
- W1982562020 modified "2023-09-27" @default.
- W1982562020 title "P-184: Application of Deep Micromachining of Silicon Substrates to Realize a Novel Electrochromic Based Projection Display" @default.
- W1982562020 cites W1984699389 @default.
- W1982562020 cites W2025378938 @default.
- W1982562020 doi "https://doi.org/10.1889/1.3621243" @default.
- W1982562020 hasPublicationYear "2011" @default.
- W1982562020 type Work @default.
- W1982562020 sameAs 1982562020 @default.
- W1982562020 citedByCount "0" @default.
- W1982562020 crossrefType "journal-article" @default.
- W1982562020 hasAuthorship W1982562020A5025552373 @default.
- W1982562020 hasAuthorship W1982562020A5071432172 @default.
- W1982562020 hasAuthorship W1982562020A5078426512 @default.
- W1982562020 hasConcept C100460472 @default.
- W1982562020 hasConcept C101643646 @default.
- W1982562020 hasConcept C111368507 @default.
- W1982562020 hasConcept C124634506 @default.
- W1982562020 hasConcept C127313418 @default.
- W1982562020 hasConcept C1291036 @default.
- W1982562020 hasConcept C130472188 @default.
- W1982562020 hasConcept C136525101 @default.
- W1982562020 hasConcept C142724271 @default.
- W1982562020 hasConcept C145667562 @default.
- W1982562020 hasConcept C147789679 @default.
- W1982562020 hasConcept C160671074 @default.
- W1982562020 hasConcept C171250308 @default.
- W1982562020 hasConcept C17525397 @default.
- W1982562020 hasConcept C185592680 @default.
- W1982562020 hasConcept C192562407 @default.
- W1982562020 hasConcept C204787440 @default.
- W1982562020 hasConcept C2777289219 @default.
- W1982562020 hasConcept C2778166601 @default.
- W1982562020 hasConcept C2779227376 @default.
- W1982562020 hasConcept C49040817 @default.
- W1982562020 hasConcept C544956773 @default.
- W1982562020 hasConcept C71924100 @default.
- W1982562020 hasConceptScore W1982562020C100460472 @default.
- W1982562020 hasConceptScore W1982562020C101643646 @default.
- W1982562020 hasConceptScore W1982562020C111368507 @default.
- W1982562020 hasConceptScore W1982562020C124634506 @default.
- W1982562020 hasConceptScore W1982562020C127313418 @default.
- W1982562020 hasConceptScore W1982562020C1291036 @default.
- W1982562020 hasConceptScore W1982562020C130472188 @default.
- W1982562020 hasConceptScore W1982562020C136525101 @default.
- W1982562020 hasConceptScore W1982562020C142724271 @default.
- W1982562020 hasConceptScore W1982562020C145667562 @default.
- W1982562020 hasConceptScore W1982562020C147789679 @default.
- W1982562020 hasConceptScore W1982562020C160671074 @default.
- W1982562020 hasConceptScore W1982562020C171250308 @default.
- W1982562020 hasConceptScore W1982562020C17525397 @default.
- W1982562020 hasConceptScore W1982562020C185592680 @default.
- W1982562020 hasConceptScore W1982562020C192562407 @default.
- W1982562020 hasConceptScore W1982562020C204787440 @default.
- W1982562020 hasConceptScore W1982562020C2777289219 @default.
- W1982562020 hasConceptScore W1982562020C2778166601 @default.
- W1982562020 hasConceptScore W1982562020C2779227376 @default.
- W1982562020 hasConceptScore W1982562020C49040817 @default.
- W1982562020 hasConceptScore W1982562020C544956773 @default.
- W1982562020 hasConceptScore W1982562020C71924100 @default.
- W1982562020 hasIssue "1" @default.
- W1982562020 hasLocation W19825620201 @default.
- W1982562020 hasOpenAccess W1982562020 @default.
- W1982562020 hasPrimaryLocation W19825620201 @default.
- W1982562020 hasRelatedWork W1980334999 @default.
- W1982562020 hasRelatedWork W2013557620 @default.
- W1982562020 hasRelatedWork W2023483409 @default.
- W1982562020 hasRelatedWork W2050746330 @default.
- W1982562020 hasRelatedWork W2055095209 @default.
- W1982562020 hasRelatedWork W2109285778 @default.
- W1982562020 hasRelatedWork W2748603911 @default.
- W1982562020 hasRelatedWork W2903101056 @default.
- W1982562020 hasRelatedWork W3095830240 @default.
- W1982562020 hasRelatedWork W2186803100 @default.
- W1982562020 hasVolume "42" @default.
- W1982562020 isParatext "false" @default.
- W1982562020 isRetracted "false" @default.
- W1982562020 magId "1982562020" @default.
- W1982562020 workType "article" @default.