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- W1982693059 abstract "P2O5–SiO2 (PSG) films were deposited from a nondoped silicon target by reactive sputtering in an oxygen–argon mixture added to phosphorus vapor. The phosphorus vapor was generated by heating a crucible containing solid red phosphorus in the sputtering system. PSG films with phosphorus concentration of up to 3×1021 cm−3 were successfully deposited at low substrate temperature. Phosphorus concentration in the films could be controlled by not only the crucible temperature but also the sputtering gas pressure." @default.
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- W1982693059 date "1985-07-01" @default.
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- W1982693059 title "P2O5–SiO2 film deposition by reactive sputtering in phosphorus vapor" @default.
- W1982693059 doi "https://doi.org/10.1116/1.573380" @default.
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