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- W1982711098 abstract "Pulsed plasmas are very powerful tools to investigate mechanisms. This paper is focused on H atom kinetics in low-pressure high-density inductively coupled pulsed plasmas. We explore pure H2, H2/N2, CH4/H2 and CH4/N2 mixtures. These gas mixtures offer two very different kinds of wall conditions, which are stainless-steel and hydrocarbon-coated walls. It shows that H loss probability (β) is sensitive to wall conditions. Efforts are made to understand β evolutions with the different parameters. The effect of pressure in non-depositing plasmas is also investigated. Evolution of H atom surface loss probability is linked to ion flux measurements. Ion bombardment promotes H surface loss." @default.
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- W1982711098 date "2013-08-08" @default.
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- W1982711098 title "H atom surface loss kinetics in pulsed inductively coupled plasmas" @default.
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- W1982711098 doi "https://doi.org/10.1088/0963-0252/22/5/055004" @default.
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