Matches in SemOpenAlex for { <https://semopenalex.org/work/W1982908659> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W1982908659 endingPage "1872" @default.
- W1982908659 startingPage "1867" @default.
- W1982908659 abstract "The heterogeneous nucleation and subsequent growth of chemical vapor deposited copper using hexafluoroacetylacetonate-Cu(I)-trimethylvinylsilane on physical vapor deposited tantalum and chemical vapor deposited titanium nitride was studied by means of electron microscopy and atomic force microscopy. It was found that the nucleation densities are about two orders of magnitude higher on TiN than on Ta. This leads to an increased roughness of films deposited on Ta compared to those produced on TiN. Moreover, the Cu films on the Ta substrate show a large number of voids, whereas no such voids were observable in the Cu films deposited on top of TiN. A simplified model for the influence of gas-surface reaction and surface self-diffusion on the shape of the Cu grains was developed. This model, which is supported by the experimental data, shows that if the grain shape changes from spherical to nonspherical before coalescence with neighboring grains, voids occur. A critical grain size and nucleation density of about 150 nm and 5×1013 m−2, respectively, were calculated for the deposition conditions used in this work." @default.
- W1982908659 created "2016-06-24" @default.
- W1982908659 creator A5006073913 @default.
- W1982908659 creator A5011608332 @default.
- W1982908659 creator A5015026297 @default.
- W1982908659 creator A5034788302 @default.
- W1982908659 creator A5039436204 @default.
- W1982908659 date "2000-08-15" @default.
- W1982908659 modified "2023-09-26" @default.
- W1982908659 title "The role of kinetics in the nucleation and void formation in copper films produced by chemical vapor deposition" @default.
- W1982908659 cites W1973429046 @default.
- W1982908659 cites W2021655069 @default.
- W1982908659 cites W2059977982 @default.
- W1982908659 cites W2078008801 @default.
- W1982908659 doi "https://doi.org/10.1063/1.1305825" @default.
- W1982908659 hasPublicationYear "2000" @default.
- W1982908659 type Work @default.
- W1982908659 sameAs 1982908659 @default.
- W1982908659 citedByCount "15" @default.
- W1982908659 countsByYear W19829086592014 @default.
- W1982908659 countsByYear W19829086592015 @default.
- W1982908659 countsByYear W19829086592021 @default.
- W1982908659 crossrefType "journal-article" @default.
- W1982908659 hasAuthorship W1982908659A5006073913 @default.
- W1982908659 hasAuthorship W1982908659A5011608332 @default.
- W1982908659 hasAuthorship W1982908659A5015026297 @default.
- W1982908659 hasAuthorship W1982908659A5034788302 @default.
- W1982908659 hasAuthorship W1982908659A5039436204 @default.
- W1982908659 hasConcept C121332964 @default.
- W1982908659 hasConcept C127413603 @default.
- W1982908659 hasConcept C147789679 @default.
- W1982908659 hasConcept C149792144 @default.
- W1982908659 hasConcept C150394285 @default.
- W1982908659 hasConcept C15696416 @default.
- W1982908659 hasConcept C159985019 @default.
- W1982908659 hasConcept C171250308 @default.
- W1982908659 hasConcept C178790620 @default.
- W1982908659 hasConcept C185592680 @default.
- W1982908659 hasConcept C19067145 @default.
- W1982908659 hasConcept C191897082 @default.
- W1982908659 hasConcept C192562407 @default.
- W1982908659 hasConcept C194760766 @default.
- W1982908659 hasConcept C2778489163 @default.
- W1982908659 hasConcept C2778836790 @default.
- W1982908659 hasConcept C2779227376 @default.
- W1982908659 hasConcept C2779772531 @default.
- W1982908659 hasConcept C42360764 @default.
- W1982908659 hasConcept C51576277 @default.
- W1982908659 hasConcept C525849907 @default.
- W1982908659 hasConcept C544778455 @default.
- W1982908659 hasConcept C57410435 @default.
- W1982908659 hasConcept C61048295 @default.
- W1982908659 hasConcept C87355193 @default.
- W1982908659 hasConceptScore W1982908659C121332964 @default.
- W1982908659 hasConceptScore W1982908659C127413603 @default.
- W1982908659 hasConceptScore W1982908659C147789679 @default.
- W1982908659 hasConceptScore W1982908659C149792144 @default.
- W1982908659 hasConceptScore W1982908659C150394285 @default.
- W1982908659 hasConceptScore W1982908659C15696416 @default.
- W1982908659 hasConceptScore W1982908659C159985019 @default.
- W1982908659 hasConceptScore W1982908659C171250308 @default.
- W1982908659 hasConceptScore W1982908659C178790620 @default.
- W1982908659 hasConceptScore W1982908659C185592680 @default.
- W1982908659 hasConceptScore W1982908659C19067145 @default.
- W1982908659 hasConceptScore W1982908659C191897082 @default.
- W1982908659 hasConceptScore W1982908659C192562407 @default.
- W1982908659 hasConceptScore W1982908659C194760766 @default.
- W1982908659 hasConceptScore W1982908659C2778489163 @default.
- W1982908659 hasConceptScore W1982908659C2778836790 @default.
- W1982908659 hasConceptScore W1982908659C2779227376 @default.
- W1982908659 hasConceptScore W1982908659C2779772531 @default.
- W1982908659 hasConceptScore W1982908659C42360764 @default.
- W1982908659 hasConceptScore W1982908659C51576277 @default.
- W1982908659 hasConceptScore W1982908659C525849907 @default.
- W1982908659 hasConceptScore W1982908659C544778455 @default.
- W1982908659 hasConceptScore W1982908659C57410435 @default.
- W1982908659 hasConceptScore W1982908659C61048295 @default.
- W1982908659 hasConceptScore W1982908659C87355193 @default.
- W1982908659 hasIssue "4" @default.
- W1982908659 hasLocation W19829086591 @default.
- W1982908659 hasOpenAccess W1982908659 @default.
- W1982908659 hasPrimaryLocation W19829086591 @default.
- W1982908659 hasRelatedWork W1974558691 @default.
- W1982908659 hasRelatedWork W1976767033 @default.
- W1982908659 hasRelatedWork W1982908659 @default.
- W1982908659 hasRelatedWork W1999534620 @default.
- W1982908659 hasRelatedWork W2009739716 @default.
- W1982908659 hasRelatedWork W2024003801 @default.
- W1982908659 hasRelatedWork W2039778088 @default.
- W1982908659 hasRelatedWork W2059480548 @default.
- W1982908659 hasRelatedWork W2117343296 @default.
- W1982908659 hasRelatedWork W2951818202 @default.
- W1982908659 hasVolume "88" @default.
- W1982908659 isParatext "false" @default.
- W1982908659 isRetracted "false" @default.
- W1982908659 magId "1982908659" @default.
- W1982908659 workType "article" @default.