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• W1983131112 endingPage "301" @default.
• W1983131112 startingPage "295" @default.
• W1983131112 abstract "Wedge polishing was used to prepare one-dimensional Si n-p junction and Si p-channel metal-oxide-silicon field effect transistor (pMOSFET) samples for precise and quantitative electrostatic potential analysis using off-axis electron holography. To avoid artifacts associated with ion milling, cloth polishing with 0.02-microm colloidal silica suspension was used for final thinning. Uniform thickness and no significant charging were observed by electron holography analysis for samples prepared entirely by this method. The effect of sample thickness was investigated and the minimum thickness for reliable results was found to be approximately 160 nm. Below this thickness, measured phase changes were smaller than expected. For the pMOSFET sample, quantitative analysis of two-dimensional electrostatic potential distribution showed that the metallurgical gate length (separation between two extension junctions) was approximately 54 nm, whereas the actual gate length was measured to be approximately 70 nm by conventional transmission electron microscopy. Thus, source and drain junction encroachment under the gate was 16 nm." @default.
• W1983131112 created "2016-06-24" @default.
• W1983131112 creator A5012677271 @default.
• W1983131112 creator A5019092953 @default.
• W1983131112 creator A5024468416 @default.
• W1983131112 creator A5039340206 @default.
• W1983131112 creator A5078232429 @default.
• W1983131112 creator A5080775135 @default.
• W1983131112 creator A5083656318 @default.
• W1983131112 date "2006-07-14" @default.
• W1983131112 modified "2023-10-16" @default.
• W1983131112 title "Sample Preparation for Precise and Quantitative Electron Holographic Analysis of Semiconductor Devices" @default.
• W1983131112 cites W2001959977 @default.
• W1983131112 cites W2010914637 @default.
• W1983131112 cites W2018924534 @default.
• W1983131112 cites W2030869830 @default.
• W1983131112 cites W2031696114 @default.
• W1983131112 cites W2048353977 @default.
• W1983131112 cites W2057818005 @default.
• W1983131112 cites W2062874315 @default.
• W1983131112 cites W2072888804 @default.
• W1983131112 cites W2085971610 @default.
• W1983131112 doi "https://doi.org/10.1017/s1431927606060351" @default.
• W1983131112 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/16842641" @default.
• W1983131112 hasPublicationYear "2006" @default.
• W1983131112 type Work @default.
• W1983131112 sameAs 1983131112 @default.
• W1983131112 citedByCount "19" @default.
• W1983131112 countsByYear W19831311122014 @default.
• W1983131112 countsByYear W19831311122015 @default.
• W1983131112 countsByYear W19831311122016 @default.
• W1983131112 countsByYear W19831311122019 @default.
• W1983131112 countsByYear W19831311122022 @default.
• W1983131112 countsByYear W19831311122023 @default.
• W1983131112 crossrefType "journal-article" @default.
• W1983131112 hasAuthorship W1983131112A5012677271 @default.
• W1983131112 hasAuthorship W1983131112A5019092953 @default.
• W1983131112 hasAuthorship W1983131112A5024468416 @default.
• W1983131112 hasAuthorship W1983131112A5039340206 @default.
• W1983131112 hasAuthorship W1983131112A5078232429 @default.
• W1983131112 hasAuthorship W1983131112A5080775135 @default.
• W1983131112 hasAuthorship W1983131112A5083656318 @default.
• W1983131112 hasConcept C108225325 @default.
• W1983131112 hasConcept C113196181 @default.
• W1983131112 hasConcept C119599485 @default.
• W1983131112 hasConcept C120665830 @default.
• W1983131112 hasConcept C121332964 @default.
• W1983131112 hasConcept C127413603 @default.
• W1983131112 hasConcept C138113353 @default.
• W1983131112 hasConcept C146088050 @default.
• W1983131112 hasConcept C147120987 @default.
• W1983131112 hasConcept C159985019 @default.
• W1983131112 hasConcept C165801399 @default.
• W1983131112 hasConcept C171250308 @default.
• W1983131112 hasConcept C172385210 @default.
• W1983131112 hasConcept C185592680 @default.
• W1983131112 hasConcept C192562407 @default.
• W1983131112 hasConcept C2776451378 @default.
• W1983131112 hasConcept C43617362 @default.
• W1983131112 hasConcept C47422493 @default.
• W1983131112 hasConcept C49040817 @default.
• W1983131112 hasConcept C544956773 @default.
• W1983131112 hasConcept C62520636 @default.
• W1983131112 hasConceptScore W1983131112C108225325 @default.
• W1983131112 hasConceptScore W1983131112C113196181 @default.
• W1983131112 hasConceptScore W1983131112C119599485 @default.
• W1983131112 hasConceptScore W1983131112C120665830 @default.
• W1983131112 hasConceptScore W1983131112C121332964 @default.
• W1983131112 hasConceptScore W1983131112C127413603 @default.
• W1983131112 hasConceptScore W1983131112C138113353 @default.
• W1983131112 hasConceptScore W1983131112C146088050 @default.
• W1983131112 hasConceptScore W1983131112C147120987 @default.
• W1983131112 hasConceptScore W1983131112C159985019 @default.
• W1983131112 hasConceptScore W1983131112C165801399 @default.
• W1983131112 hasConceptScore W1983131112C171250308 @default.
• W1983131112 hasConceptScore W1983131112C172385210 @default.
• W1983131112 hasConceptScore W1983131112C185592680 @default.
• W1983131112 hasConceptScore W1983131112C192562407 @default.
• W1983131112 hasConceptScore W1983131112C2776451378 @default.
• W1983131112 hasConceptScore W1983131112C43617362 @default.
• W1983131112 hasConceptScore W1983131112C47422493 @default.
• W1983131112 hasConceptScore W1983131112C49040817 @default.
• W1983131112 hasConceptScore W1983131112C544956773 @default.
• W1983131112 hasConceptScore W1983131112C62520636 @default.
• W1983131112 hasIssue "4" @default.
• W1983131112 hasLocation W19831311121 @default.
• W1983131112 hasLocation W19831311122 @default.
• W1983131112 hasOpenAccess W1983131112 @default.
• W1983131112 hasPrimaryLocation W19831311121 @default.
• W1983131112 hasRelatedWork W2029221218 @default.
• W1983131112 hasRelatedWork W2050321631 @default.
• W1983131112 hasRelatedWork W2312552982 @default.
• W1983131112 hasRelatedWork W2381657207 @default.
• W1983131112 hasRelatedWork W2892192179 @default.
• W1983131112 hasRelatedWork W2902546961 @default.
• W1983131112 hasRelatedWork W3031607024 @default.
• W1983131112 hasRelatedWork W3197346227 @default.
• W1983131112 hasRelatedWork W4296520578 @default.

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