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- W1983138107 endingPage "C33" @default.
- W1983138107 startingPage "C33" @default.
- W1983138107 abstract "Room temperature recrystallization of electrodeposited copper metallization was observed in real time by in situ atomic force microscopy. The films examined were 31 nm thick and were deposited galvanostatically from a stirred bath containing and both with and without thiourea, typically at Substrates were polished bulk gold or sputter-coated copper films on TaN on silicon. An induction period was observed before the onset of recrystallization, and subsequently, grain growth occurred. The nucleated grains appeared to be significantly smaller than the existing grains and this may have important implications for surface reactivity and the stability and evolution of microstructure. Surface roughness measurements were correlated with recrystallization. © 2003 The Electrochemical Society. All rights reserved." @default.
- W1983138107 created "2016-06-24" @default.
- W1983138107 creator A5033432167 @default.
- W1983138107 creator A5075373065 @default.
- W1983138107 date "2003-01-01" @default.
- W1983138107 modified "2023-09-23" @default.
- W1983138107 title "Real Time Observation by Atomic Force Microscopy of Spontaneous Recrystallization at Room Temperature in Electrodeposited Copper Metallization" @default.
- W1983138107 cites W1977713871 @default.
- W1983138107 cites W1986329512 @default.
- W1983138107 cites W1995250994 @default.
- W1983138107 cites W2005687021 @default.
- W1983138107 cites W2012607516 @default.
- W1983138107 cites W2013779936 @default.
- W1983138107 cites W2020573920 @default.
- W1983138107 cites W2024457293 @default.
- W1983138107 cites W2028754517 @default.
- W1983138107 cites W2041662748 @default.
- W1983138107 cites W2054966362 @default.
- W1983138107 cites W2063016463 @default.
- W1983138107 cites W2078273934 @default.
- W1983138107 cites W2078695854 @default.
- W1983138107 cites W2082486984 @default.
- W1983138107 cites W2090721423 @default.
- W1983138107 cites W2095300090 @default.
- W1983138107 cites W2104914161 @default.
- W1983138107 cites W2109325316 @default.
- W1983138107 cites W2167204816 @default.
- W1983138107 cites W2331621354 @default.
- W1983138107 doi "https://doi.org/10.1149/1.1539772" @default.
- W1983138107 hasPublicationYear "2003" @default.
- W1983138107 type Work @default.
- W1983138107 sameAs 1983138107 @default.
- W1983138107 citedByCount "15" @default.
- W1983138107 countsByYear W19831381072014 @default.
- W1983138107 countsByYear W19831381072017 @default.
- W1983138107 crossrefType "journal-article" @default.
- W1983138107 hasAuthorship W1983138107A5033432167 @default.
- W1983138107 hasAuthorship W1983138107A5075373065 @default.
- W1983138107 hasConcept C102951782 @default.
- W1983138107 hasConcept C107365816 @default.
- W1983138107 hasConcept C151730666 @default.
- W1983138107 hasConcept C159985019 @default.
- W1983138107 hasConcept C171250308 @default.
- W1983138107 hasConcept C178790620 @default.
- W1983138107 hasConcept C185592680 @default.
- W1983138107 hasConcept C191897082 @default.
- W1983138107 hasConcept C192191005 @default.
- W1983138107 hasConcept C192562407 @default.
- W1983138107 hasConcept C195702682 @default.
- W1983138107 hasConcept C2780538656 @default.
- W1983138107 hasConcept C544778455 @default.
- W1983138107 hasConcept C544956773 @default.
- W1983138107 hasConcept C86803240 @default.
- W1983138107 hasConcept C87976508 @default.
- W1983138107 hasConceptScore W1983138107C102951782 @default.
- W1983138107 hasConceptScore W1983138107C107365816 @default.
- W1983138107 hasConceptScore W1983138107C151730666 @default.
- W1983138107 hasConceptScore W1983138107C159985019 @default.
- W1983138107 hasConceptScore W1983138107C171250308 @default.
- W1983138107 hasConceptScore W1983138107C178790620 @default.
- W1983138107 hasConceptScore W1983138107C185592680 @default.
- W1983138107 hasConceptScore W1983138107C191897082 @default.
- W1983138107 hasConceptScore W1983138107C192191005 @default.
- W1983138107 hasConceptScore W1983138107C192562407 @default.
- W1983138107 hasConceptScore W1983138107C195702682 @default.
- W1983138107 hasConceptScore W1983138107C2780538656 @default.
- W1983138107 hasConceptScore W1983138107C544778455 @default.
- W1983138107 hasConceptScore W1983138107C544956773 @default.
- W1983138107 hasConceptScore W1983138107C86803240 @default.
- W1983138107 hasConceptScore W1983138107C87976508 @default.
- W1983138107 hasIssue "3" @default.
- W1983138107 hasLocation W19831381071 @default.
- W1983138107 hasOpenAccess W1983138107 @default.
- W1983138107 hasPrimaryLocation W19831381071 @default.
- W1983138107 hasRelatedWork W150843855 @default.
- W1983138107 hasRelatedWork W1972254111 @default.
- W1983138107 hasRelatedWork W2011794728 @default.
- W1983138107 hasRelatedWork W2020660716 @default.
- W1983138107 hasRelatedWork W2058945371 @default.
- W1983138107 hasRelatedWork W2351679394 @default.
- W1983138107 hasRelatedWork W2362660126 @default.
- W1983138107 hasRelatedWork W2372425130 @default.
- W1983138107 hasRelatedWork W2391140943 @default.
- W1983138107 hasRelatedWork W3157307459 @default.
- W1983138107 hasVolume "6" @default.
- W1983138107 isParatext "false" @default.
- W1983138107 isRetracted "false" @default.
- W1983138107 magId "1983138107" @default.
- W1983138107 workType "article" @default.