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- W1983151933 abstract "We have determined, by laser light scattering experiments at three different angles (90°±9°) and by use of the Mie theory, the temporal evolution of particle size (in the range 40–110 nm) in an argon silane radio frequency discharge. The results are in good agreement with values previously determined by transmission electron microscopy. The evolution of the optical indices (absorption and refraction) has been calculated as a function of the particle size at λ=514 nm. We have also shown that these variations are independent of the electrical charges of the particles. The particle density in the discharge is about 108 cm−3." @default.
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- W1983151933 date "1998-04-15" @default.
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- W1983151933 title "Determination of the size, optical index and density of particles in an argon–silane radio-frequency discharge" @default.
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- W1983151933 doi "https://doi.org/10.1063/1.367989" @default.
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