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- W1983251005 abstract "We report microresonators with the highest Q on a double-layer SOI material platform developed using wafer bonding. We also demonstrate 2 μm radius resonators with Q's>20k which are the most compact resonators on such platforms." @default.
- W1983251005 created "2016-06-24" @default.
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- W1983251005 date "2013-09-01" @default.
- W1983251005 modified "2023-09-26" @default.
- W1983251005 title "High-Q resonators on double-layer SOI platform" @default.
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- W1983251005 doi "https://doi.org/10.1109/ipcon.2013.6656621" @default.
- W1983251005 hasPublicationYear "2013" @default.
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