Matches in SemOpenAlex for { <https://semopenalex.org/work/W1983352318> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W1983352318 endingPage "5479" @default.
- W1983352318 startingPage "5476" @default.
- W1983352318 abstract "The processing of integrated circuits usually introduces mechanical stress into the device structure. Contradictory results and speculations exist in the literature on the effects of such stresses on the electrical properties of the SiO2–Si interface. Results of three series of experiments in which the electrical properties were measured by MOS capacitance-voltage methods are reported. Stress was applied at the SiO2–Si interface by deposition of stressed tungsten films. In the first experiments, the stress at the SiO2–Si interface was varied by deposition techniques and heat treatments. Although several such experiments are reported in the literature, our results demonstrate that such experiments invariably lead to ambiguous results and interpretation. A second series of experiments in which the metallization thickness was varied by planar etching, and a third series in which metallization patterns of widely differing geometries, from 5 to 500 μm were used, separately show conclusively that mechanical stresses in the range encountered in device structures do not affect the electrical properties of the SiO2–Si interface." @default.
- W1983352318 created "2016-06-24" @default.
- W1983352318 creator A5058180263 @default.
- W1983352318 creator A5067156140 @default.
- W1983352318 date "1973-12-01" @default.
- W1983352318 modified "2023-09-26" @default.
- W1983352318 title "Electrical properties of metal‐SiO<sub>2</sub>‐silicon structures under mechanical stress" @default.
- W1983352318 cites W1991058883 @default.
- W1983352318 cites W1993713024 @default.
- W1983352318 cites W2002765787 @default.
- W1983352318 cites W2004681443 @default.
- W1983352318 cites W2007487474 @default.
- W1983352318 cites W2016458631 @default.
- W1983352318 cites W2025582070 @default.
- W1983352318 cites W2031290879 @default.
- W1983352318 cites W2071751565 @default.
- W1983352318 cites W2079471989 @default.
- W1983352318 cites W2156691787 @default.
- W1983352318 doi "https://doi.org/10.1063/1.1662179" @default.
- W1983352318 hasPublicationYear "1973" @default.
- W1983352318 type Work @default.
- W1983352318 sameAs 1983352318 @default.
- W1983352318 citedByCount "14" @default.
- W1983352318 countsByYear W19833523182019 @default.
- W1983352318 crossrefType "journal-article" @default.
- W1983352318 hasAuthorship W1983352318A5058180263 @default.
- W1983352318 hasAuthorship W1983352318A5067156140 @default.
- W1983352318 hasConcept C138885662 @default.
- W1983352318 hasConcept C147789679 @default.
- W1983352318 hasConcept C159985019 @default.
- W1983352318 hasConcept C17525397 @default.
- W1983352318 hasConcept C185592680 @default.
- W1983352318 hasConcept C191897082 @default.
- W1983352318 hasConcept C192562407 @default.
- W1983352318 hasConcept C21036866 @default.
- W1983352318 hasConcept C30066665 @default.
- W1983352318 hasConcept C41895202 @default.
- W1983352318 hasConcept C49040817 @default.
- W1983352318 hasConcept C542268612 @default.
- W1983352318 hasConcept C544956773 @default.
- W1983352318 hasConceptScore W1983352318C138885662 @default.
- W1983352318 hasConceptScore W1983352318C147789679 @default.
- W1983352318 hasConceptScore W1983352318C159985019 @default.
- W1983352318 hasConceptScore W1983352318C17525397 @default.
- W1983352318 hasConceptScore W1983352318C185592680 @default.
- W1983352318 hasConceptScore W1983352318C191897082 @default.
- W1983352318 hasConceptScore W1983352318C192562407 @default.
- W1983352318 hasConceptScore W1983352318C21036866 @default.
- W1983352318 hasConceptScore W1983352318C30066665 @default.
- W1983352318 hasConceptScore W1983352318C41895202 @default.
- W1983352318 hasConceptScore W1983352318C49040817 @default.
- W1983352318 hasConceptScore W1983352318C542268612 @default.
- W1983352318 hasConceptScore W1983352318C544956773 @default.
- W1983352318 hasIssue "12" @default.
- W1983352318 hasLocation W19833523181 @default.
- W1983352318 hasOpenAccess W1983352318 @default.
- W1983352318 hasPrimaryLocation W19833523181 @default.
- W1983352318 hasRelatedWork W2082293200 @default.
- W1983352318 hasRelatedWork W2137307547 @default.
- W1983352318 hasRelatedWork W2380293314 @default.
- W1983352318 hasRelatedWork W2392190330 @default.
- W1983352318 hasRelatedWork W2943188944 @default.
- W1983352318 hasRelatedWork W3008690834 @default.
- W1983352318 hasRelatedWork W3082440218 @default.
- W1983352318 hasRelatedWork W4207045224 @default.
- W1983352318 hasRelatedWork W4242480814 @default.
- W1983352318 hasRelatedWork W4285802202 @default.
- W1983352318 hasVolume "44" @default.
- W1983352318 isParatext "false" @default.
- W1983352318 isRetracted "false" @default.
- W1983352318 magId "1983352318" @default.
- W1983352318 workType "article" @default.