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- W1983533332 abstract "12 In manufacturing a rotating-analyzer ellipsometer, error sources and calibration methods are discussed. It is important to get rid of external noise for measurement of high thickness resolution and accurate optical constant and this means that the precision of system above all is important to develop the ellipsometer. Therefore the precision design and error calibration of the optical components in ellipsometer are inevitable. We propose a PSA (polarizer-specimen-analyzer) system to manufacture a rotating-analyzer ellipsometer." @default.
- W1983533332 created "2016-06-24" @default.
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- W1983533332 date "2001-02-12" @default.
- W1983533332 modified "2023-10-18" @default.
- W1983533332 title "<title>Analysis of error and development of calibration's method to design precision rotating analyzer ellipsometer</title>" @default.
- W1983533332 doi "https://doi.org/10.1117/12.417215" @default.
- W1983533332 hasPublicationYear "2001" @default.
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