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• W1983544306 abstract "Abstract The properties of cubic BN (c-BN) containing boron nitride films grown by plasma-assisted chemical vapour deposition (PACVD) from borane-ammonia were investigated as a function of deposition parameters. It was found that the c-BN content, determined by IR absorption and refractive index measurements is enhanced by the use of a raised substrate temperature and by hot filament activation. A reduction in the film stress is also found under the same conditions." @default.
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• W1983544306 date "1992-01-01" @default.
• W1983544306 modified "2023-09-27" @default.
• W1983544306 title "Effect of deposition parameters on the formation of cubic BN films deposited by plasma-assisted chemical vapour deposition from non-toxic material" @default.
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• W1983544306 doi "https://doi.org/10.1016/s0257-8972(07)80047-8" @default.
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