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- W1983572106 abstract "This study has focused on the effect of ultrasonic vibration table in ELID grinding process of aluminum nitride ceramics. Aluminum nitride ceramics has superior physical and chemical properties and widely used in IC, LSI substrate, package and so on. To achieve the high effective machining of brittle and high strength ceramics as like aluminum nitride, machining method combined ELID grinding and ultrasonic vibration has been adopted in this study. From the experimental results, material removal rate, MRR has been increased maximum 36 percent and spindle resistance has been decreased in using ultrasonic table. Surface roughness of ground surface became a little worse in using ultrasonic table but was somewhat improved in feed direction." @default.
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- W1983572106 date "2013-12-01" @default.
- W1983572106 modified "2023-09-27" @default.
- W1983572106 title "The Effect of Ultrasonic Vibration Table on ELID Grinding Process of Aluminum Nitride Ceramics" @default.
- W1983572106 cites W1879648170 @default.
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- W1983572106 doi "https://doi.org/10.7736/kspe.2013.30.12.1237" @default.
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