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- W1983598522 abstract "An accelerated test method and resulting metrology data are presented to show the effects of x- ray radiation on various x-ray mask membrane materials. A focused x-ray beam effectively reduces the radiation time to 1/5 of that required by normal exposure beam flux. Absolute image displacement results determined by this method indicate imperceptible movement for boron-doped silicon and silicon carbide membranes at a total incident dose of 500 KJ/cm<SUP>2</SUP>, while image displacement for diamond is 50 nm at 150 KJ/cm<SUP>2</SUP> and silicon nitride is 70 nm at 36 KJ/cm<SUP>2</SUP>. Studies of temperature rise during the radiation test and effects of the high flux radiation, i.e., reciprocity tests, demonstrate the validity of this test method." @default.
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- W1983598522 date "1993-06-24" @default.
- W1983598522 modified "2023-09-27" @default.
- W1983598522 title "<title>Accelerated radiation damage testing of x-ray mask membrane materials</title>" @default.
- W1983598522 doi "https://doi.org/10.1117/12.146527" @default.
- W1983598522 hasPublicationYear "1993" @default.
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