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- W1983644474 abstract "The effects of UV laser light irradiation on the growth of ZnO films by photo-MOCVD, using DEZ and NO2 as source materials, have been investigated. When focused incident laser beams were passed above the substrates, the film growth rate increased compared to growth without laser light. When the substrates were directly irradiated by the laser beam, the observed effects included an increase in the growth rate of the film, an improvement in c-axis orientation and a decrease in the electrical resistivity of the ZnO film. c-Axis oriented ZnO films have also been grown successfully on glass substrates at a substrate temperature of 150°C. These results mean that surface reactions play a very important role in photo-MOCVD of ZnO." @default.
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- W1983644474 date "1989-04-01" @default.
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- W1983644474 title "Effects of UV light irradiation on the growth of ZnO films" @default.
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- W1983644474 doi "https://doi.org/10.1016/0022-0248(89)90122-x" @default.
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