Matches in SemOpenAlex for { <https://semopenalex.org/work/W1983670630> ?p ?o ?g. }
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- W1983670630 endingPage "1775" @default.
- W1983670630 startingPage "1775" @default.
- W1983670630 abstract "We have evaluated the alloying behavior of W and other refractory metal films on on Si at temperatures ranging from 700° to 900°C. Nearly complete formation is observed in the case of samples annealed above 750°C (1 hr). Si appears to be the diffusing species, and provides an unpassivated interface between and . is a metallic conductor with a resistivity of ∼54 µohm‐cm. Unlike , does not oxidize upon heating in air up to 900°C. Its formation in the ohmic contact areas is, however, undesirable because of the volume changes accompanying its formation. In the case of other refractory metalization systems, where M is Ti, V, Cr, Ni, NiCr, Mo, and Ta, also offers little resistance to M‐silicide formation at high temperatures (800°–900°C)." @default.
- W1983670630 created "2016-06-24" @default.
- W1983670630 creator A5005103403 @default.
- W1983670630 creator A5060449983 @default.
- W1983670630 creator A5091493588 @default.
- W1983670630 date "1973-01-01" @default.
- W1983670630 modified "2023-10-16" @default.
- W1983670630 title "Silicide Formation in Tungsten and Other Refractory Metalizations on PtSi on Silicon" @default.
- W1983670630 doi "https://doi.org/10.1149/1.2403362" @default.
- W1983670630 hasPublicationYear "1973" @default.
- W1983670630 type Work @default.
- W1983670630 sameAs 1983670630 @default.
- W1983670630 citedByCount "11" @default.
- W1983670630 countsByYear W19836706302015 @default.
- W1983670630 countsByYear W19836706302016 @default.
- W1983670630 countsByYear W19836706302017 @default.
- W1983670630 crossrefType "journal-article" @default.
- W1983670630 hasAuthorship W1983670630A5005103403 @default.
- W1983670630 hasAuthorship W1983670630A5060449983 @default.
- W1983670630 hasAuthorship W1983670630A5091493588 @default.
- W1983670630 hasConcept C119599485 @default.
- W1983670630 hasConcept C127413603 @default.
- W1983670630 hasConcept C138230450 @default.
- W1983670630 hasConcept C140086010 @default.
- W1983670630 hasConcept C142424586 @default.
- W1983670630 hasConcept C159985019 @default.
- W1983670630 hasConcept C191897082 @default.
- W1983670630 hasConcept C192562407 @default.
- W1983670630 hasConcept C2779227376 @default.
- W1983670630 hasConcept C2780901251 @default.
- W1983670630 hasConcept C542268612 @default.
- W1983670630 hasConcept C544153396 @default.
- W1983670630 hasConcept C544956773 @default.
- W1983670630 hasConcept C69990965 @default.
- W1983670630 hasConcept C95627916 @default.
- W1983670630 hasConceptScore W1983670630C119599485 @default.
- W1983670630 hasConceptScore W1983670630C127413603 @default.
- W1983670630 hasConceptScore W1983670630C138230450 @default.
- W1983670630 hasConceptScore W1983670630C140086010 @default.
- W1983670630 hasConceptScore W1983670630C142424586 @default.
- W1983670630 hasConceptScore W1983670630C159985019 @default.
- W1983670630 hasConceptScore W1983670630C191897082 @default.
- W1983670630 hasConceptScore W1983670630C192562407 @default.
- W1983670630 hasConceptScore W1983670630C2779227376 @default.
- W1983670630 hasConceptScore W1983670630C2780901251 @default.
- W1983670630 hasConceptScore W1983670630C542268612 @default.
- W1983670630 hasConceptScore W1983670630C544153396 @default.
- W1983670630 hasConceptScore W1983670630C544956773 @default.
- W1983670630 hasConceptScore W1983670630C69990965 @default.
- W1983670630 hasConceptScore W1983670630C95627916 @default.
- W1983670630 hasIssue "12" @default.
- W1983670630 hasLocation W19836706301 @default.
- W1983670630 hasOpenAccess W1983670630 @default.
- W1983670630 hasPrimaryLocation W19836706301 @default.
- W1983670630 hasRelatedWork W1972157352 @default.
- W1983670630 hasRelatedWork W1985534456 @default.
- W1983670630 hasRelatedWork W2000164064 @default.
- W1983670630 hasRelatedWork W2001633489 @default.
- W1983670630 hasRelatedWork W2065074567 @default.
- W1983670630 hasRelatedWork W2088654572 @default.
- W1983670630 hasRelatedWork W3177245130 @default.
- W1983670630 hasRelatedWork W4205637077 @default.
- W1983670630 hasRelatedWork W804853622 @default.
- W1983670630 hasRelatedWork W2144579153 @default.
- W1983670630 hasVolume "120" @default.
- W1983670630 isParatext "false" @default.
- W1983670630 isRetracted "false" @default.
- W1983670630 magId "1983670630" @default.
- W1983670630 workType "article" @default.