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• W1983691976 abstract "In this paper, the authors have shown that the Al-doping concentration of ZrO2 based dielectrics in BEOL has a big influence on electrical properties and reliability. Despite steep field acceleration behavior undoped ZrO2 suffers from early failures and uncontrolled leakage mechanisms. High Al-concentrations also show higher leakage current and less reliability. It is recommended to apply only small Al-doping concentrations in order to benefit from good field acceleration and capacitance density as well as low leakage current." @default.
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• W1983691976 date "2013-10-01" @default.
• W1983691976 modified "2023-09-26" @default.
• W1983691976 title "Reliability comparison of pure ZrO2 and Al− doped ZrO2 MIM capacitors" @default.
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• W1983691976 doi "https://doi.org/10.1109/iirw.2013.6804190" @default.
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