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- W1983723858 endingPage "501" @default.
- W1983723858 startingPage "501" @default.
- W1983723858 abstract "A simplified quantitative procedure for SIMS, based on the LTE (Local Thermal Equilibrium) model, was proposed and applied to Na concentration determination in Si and SiO 2 . The procedure validity was checked using In 0.1 Ga 0.9 As and PSG (phospho-silicate glass) films as standard samples. Na concentration determination was carried out using a Si wafer, whose C Na was measured by activation analysis. In the case of SiO 2 , borosilicate glasses were analyzed taking into account Na ionization yield. Then, Na distribution in SiO 2 films was measured by SIMS and was compared with the total amount of Na in SiO 2 films obtained by electrical measurement and Atomic Absorption Spectrophotometry (AAS)." @default.
- W1983723858 created "2016-06-24" @default.
- W1983723858 creator A5011639993 @default.
- W1983723858 creator A5044938272 @default.
- W1983723858 creator A5084376596 @default.
- W1983723858 date "1980-01-01" @default.
- W1983723858 modified "2023-10-08" @default.
- W1983723858 title "Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer" @default.
- W1983723858 doi "https://doi.org/10.7567/jjaps.19s1.501" @default.
- W1983723858 hasPublicationYear "1980" @default.
- W1983723858 type Work @default.
- W1983723858 sameAs 1983723858 @default.
- W1983723858 citedByCount "0" @default.
- W1983723858 crossrefType "journal-article" @default.
- W1983723858 hasAuthorship W1983723858A5011639993 @default.
- W1983723858 hasAuthorship W1983723858A5044938272 @default.
- W1983723858 hasAuthorship W1983723858A5084376596 @default.
- W1983723858 hasBestOaLocation W19837238581 @default.
- W1983723858 hasConcept C108225325 @default.
- W1983723858 hasConcept C113196181 @default.
- W1983723858 hasConcept C121332964 @default.
- W1983723858 hasConcept C134121241 @default.
- W1983723858 hasConcept C145148216 @default.
- W1983723858 hasConcept C160671074 @default.
- W1983723858 hasConcept C162356407 @default.
- W1983723858 hasConcept C162633436 @default.
- W1983723858 hasConcept C178790620 @default.
- W1983723858 hasConcept C185592680 @default.
- W1983723858 hasConcept C191897082 @default.
- W1983723858 hasConcept C192562407 @default.
- W1983723858 hasConcept C198291218 @default.
- W1983723858 hasConcept C205759337 @default.
- W1983723858 hasConcept C206802598 @default.
- W1983723858 hasConcept C2777335606 @default.
- W1983723858 hasConcept C33619061 @default.
- W1983723858 hasConcept C43617362 @default.
- W1983723858 hasConcept C49040817 @default.
- W1983723858 hasConcept C544956773 @default.
- W1983723858 hasConcept C62520636 @default.
- W1983723858 hasConcept C77671233 @default.
- W1983723858 hasConceptScore W1983723858C108225325 @default.
- W1983723858 hasConceptScore W1983723858C113196181 @default.
- W1983723858 hasConceptScore W1983723858C121332964 @default.
- W1983723858 hasConceptScore W1983723858C134121241 @default.
- W1983723858 hasConceptScore W1983723858C145148216 @default.
- W1983723858 hasConceptScore W1983723858C160671074 @default.
- W1983723858 hasConceptScore W1983723858C162356407 @default.
- W1983723858 hasConceptScore W1983723858C162633436 @default.
- W1983723858 hasConceptScore W1983723858C178790620 @default.
- W1983723858 hasConceptScore W1983723858C185592680 @default.
- W1983723858 hasConceptScore W1983723858C191897082 @default.
- W1983723858 hasConceptScore W1983723858C192562407 @default.
- W1983723858 hasConceptScore W1983723858C198291218 @default.
- W1983723858 hasConceptScore W1983723858C205759337 @default.
- W1983723858 hasConceptScore W1983723858C206802598 @default.
- W1983723858 hasConceptScore W1983723858C2777335606 @default.
- W1983723858 hasConceptScore W1983723858C33619061 @default.
- W1983723858 hasConceptScore W1983723858C43617362 @default.
- W1983723858 hasConceptScore W1983723858C49040817 @default.
- W1983723858 hasConceptScore W1983723858C544956773 @default.
- W1983723858 hasConceptScore W1983723858C62520636 @default.
- W1983723858 hasConceptScore W1983723858C77671233 @default.
- W1983723858 hasIssue "S1" @default.
- W1983723858 hasLocation W19837238581 @default.
- W1983723858 hasOpenAccess W1983723858 @default.
- W1983723858 hasPrimaryLocation W19837238581 @default.
- W1983723858 hasRelatedWork W1986509466 @default.
- W1983723858 hasRelatedWork W2032958196 @default.
- W1983723858 hasRelatedWork W2080470237 @default.
- W1983723858 hasRelatedWork W2144863835 @default.
- W1983723858 hasRelatedWork W2359451402 @default.
- W1983723858 hasRelatedWork W2380918208 @default.
- W1983723858 hasRelatedWork W2383387597 @default.
- W1983723858 hasRelatedWork W2968947504 @default.
- W1983723858 hasRelatedWork W3124999728 @default.
- W1983723858 hasRelatedWork W4210301137 @default.
- W1983723858 hasVolume "19" @default.
- W1983723858 isParatext "false" @default.
- W1983723858 isRetracted "false" @default.
- W1983723858 magId "1983723858" @default.
- W1983723858 workType "article" @default.