Matches in SemOpenAlex for { <https://semopenalex.org/work/W1983736877> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W1983736877 endingPage "3935" @default.
- W1983736877 startingPage "3930" @default.
- W1983736877 abstract "A stable high-density and low-temperature plasma was realized through excitation of standing surface waves using a plane multislot antenna. On a dielectric-window surface, the surface wave introduced from a slot interferes with that from the adjacent slot to generate a standing surface wave with odd loops at an interval of one-half wavelength of the surface wave between the slots. The plasma density is 2-10×1012 cm-3, thus the skin depth is 1.5–4 mm in the wide pressure range from 10 mTorr to 1 Torr. A superior high-density plasma with a relatively high temperature is generated near the dielectric window and a high-density plasma bulk with a low temperature is sustained through the intrinsic diffusion and the relaxation of the generated plasma. At high pressures of about 1 Torr, the plasma itself is confined near the dielectric window. The plasma is suitable for various applications, especially for high-rate and low-damage processes using large-area substrates." @default.
- W1983736877 created "2016-06-24" @default.
- W1983736877 creator A5017700477 @default.
- W1983736877 creator A5020721234 @default.
- W1983736877 creator A5045284255 @default.
- W1983736877 date "2002-06-15" @default.
- W1983736877 modified "2023-09-25" @default.
- W1983736877 title "Stable Surface-Wave Plasma through Excitation of Standing Surface Wave Using Plane Multislot Antenna" @default.
- W1983736877 cites W2002411364 @default.
- W1983736877 cites W2020111073 @default.
- W1983736877 cites W2093090387 @default.
- W1983736877 doi "https://doi.org/10.1143/jjap.41.3930" @default.
- W1983736877 hasPublicationYear "2002" @default.
- W1983736877 type Work @default.
- W1983736877 sameAs 1983736877 @default.
- W1983736877 citedByCount "7" @default.
- W1983736877 countsByYear W19837368772015 @default.
- W1983736877 countsByYear W19837368772021 @default.
- W1983736877 countsByYear W19837368772022 @default.
- W1983736877 crossrefType "journal-article" @default.
- W1983736877 hasAuthorship W1983736877A5017700477 @default.
- W1983736877 hasAuthorship W1983736877A5020721234 @default.
- W1983736877 hasAuthorship W1983736877A5045284255 @default.
- W1983736877 hasConcept C120665830 @default.
- W1983736877 hasConcept C121332964 @default.
- W1983736877 hasConcept C133386390 @default.
- W1983736877 hasConcept C15744967 @default.
- W1983736877 hasConcept C184779094 @default.
- W1983736877 hasConcept C185057767 @default.
- W1983736877 hasConcept C185592680 @default.
- W1983736877 hasConcept C192304548 @default.
- W1983736877 hasConcept C192562407 @default.
- W1983736877 hasConcept C2776029896 @default.
- W1983736877 hasConcept C30646810 @default.
- W1983736877 hasConcept C49040817 @default.
- W1983736877 hasConcept C62520636 @default.
- W1983736877 hasConcept C6260449 @default.
- W1983736877 hasConcept C77805123 @default.
- W1983736877 hasConcept C82706917 @default.
- W1983736877 hasConcept C83581075 @default.
- W1983736877 hasConcept C84174578 @default.
- W1983736877 hasConcept C97355855 @default.
- W1983736877 hasConceptScore W1983736877C120665830 @default.
- W1983736877 hasConceptScore W1983736877C121332964 @default.
- W1983736877 hasConceptScore W1983736877C133386390 @default.
- W1983736877 hasConceptScore W1983736877C15744967 @default.
- W1983736877 hasConceptScore W1983736877C184779094 @default.
- W1983736877 hasConceptScore W1983736877C185057767 @default.
- W1983736877 hasConceptScore W1983736877C185592680 @default.
- W1983736877 hasConceptScore W1983736877C192304548 @default.
- W1983736877 hasConceptScore W1983736877C192562407 @default.
- W1983736877 hasConceptScore W1983736877C2776029896 @default.
- W1983736877 hasConceptScore W1983736877C30646810 @default.
- W1983736877 hasConceptScore W1983736877C49040817 @default.
- W1983736877 hasConceptScore W1983736877C62520636 @default.
- W1983736877 hasConceptScore W1983736877C6260449 @default.
- W1983736877 hasConceptScore W1983736877C77805123 @default.
- W1983736877 hasConceptScore W1983736877C82706917 @default.
- W1983736877 hasConceptScore W1983736877C83581075 @default.
- W1983736877 hasConceptScore W1983736877C84174578 @default.
- W1983736877 hasConceptScore W1983736877C97355855 @default.
- W1983736877 hasIssue "Part 1, No. 6A" @default.
- W1983736877 hasLocation W19837368771 @default.
- W1983736877 hasOpenAccess W1983736877 @default.
- W1983736877 hasPrimaryLocation W19837368771 @default.
- W1983736877 hasRelatedWork W161630350 @default.
- W1983736877 hasRelatedWork W1889876015 @default.
- W1983736877 hasRelatedWork W1973990857 @default.
- W1983736877 hasRelatedWork W1975899350 @default.
- W1983736877 hasRelatedWork W1998523906 @default.
- W1983736877 hasRelatedWork W2052729107 @default.
- W1983736877 hasRelatedWork W2060679396 @default.
- W1983736877 hasRelatedWork W2075144443 @default.
- W1983736877 hasRelatedWork W2120618968 @default.
- W1983736877 hasRelatedWork W2784883879 @default.
- W1983736877 hasRelatedWork W2885970495 @default.
- W1983736877 hasRelatedWork W2899149877 @default.
- W1983736877 hasRelatedWork W2912515741 @default.
- W1983736877 hasRelatedWork W2951457059 @default.
- W1983736877 hasRelatedWork W2956489168 @default.
- W1983736877 hasRelatedWork W3008990569 @default.
- W1983736877 hasRelatedWork W3033174557 @default.
- W1983736877 hasRelatedWork W3082266410 @default.
- W1983736877 hasRelatedWork W3104542125 @default.
- W1983736877 hasRelatedWork W132164494 @default.
- W1983736877 hasVolume "41" @default.
- W1983736877 isParatext "false" @default.
- W1983736877 isRetracted "false" @default.
- W1983736877 magId "1983736877" @default.
- W1983736877 workType "article" @default.