Matches in SemOpenAlex for { <https://semopenalex.org/work/W1983910633> ?p ?o ?g. }
- W1983910633 endingPage "102" @default.
- W1983910633 startingPage "91" @default.
- W1983910633 abstract "The structure and composition of the native Si oxide were studied using high depth resolution medium energy ion scattering (MEIS) spectrometry. The analysis revealed that the oxide is an amorphous material of thickness 20 Å. The results showed qualitatively that the interface between the oxide and the underlying structure consists of layers of Si atoms displaced from their normal lattice sites. The composition of the native Si oxide varies with depth. The region near the surface is more highly oxidized than that near the interface. However, based on the assumption that there are two nonregistered Si layers in the interface, the results showed that the oxide consists of a layer of stoichiometric SiO2 of thickness ∼ 7 Å and a layer of suboxide (SiOx, x < 2) of thic ∼ 6 Å." @default.
- W1983910633 created "2016-06-24" @default.
- W1983910633 creator A5038018657 @default.
- W1983910633 creator A5053093918 @default.
- W1983910633 creator A5075084445 @default.
- W1983910633 creator A5079868959 @default.
- W1983910633 date "1991-01-01" @default.
- W1983910633 modified "2023-09-29" @default.
- W1983910633 title "Composition and structure of the native Si oxide by high depth resolution medium energy ion scatering" @default.
- W1983910633 cites W1966713535 @default.
- W1983910633 cites W1968045933 @default.
- W1983910633 cites W1974664861 @default.
- W1983910633 cites W1979150417 @default.
- W1983910633 cites W1982184231 @default.
- W1983910633 cites W1987495202 @default.
- W1983910633 cites W2002553438 @default.
- W1983910633 cites W2005868009 @default.
- W1983910633 cites W2022511777 @default.
- W1983910633 cites W2022551566 @default.
- W1983910633 cites W2030309071 @default.
- W1983910633 cites W2032008914 @default.
- W1983910633 cites W2055138521 @default.
- W1983910633 cites W2086433808 @default.
- W1983910633 cites W2098730923 @default.
- W1983910633 cites W2129951600 @default.
- W1983910633 cites W2138731085 @default.
- W1983910633 cites W2335303563 @default.
- W1983910633 doi "https://doi.org/10.1016/0039-6028(91)90214-d" @default.
- W1983910633 hasPublicationYear "1991" @default.
- W1983910633 type Work @default.
- W1983910633 sameAs 1983910633 @default.
- W1983910633 citedByCount "72" @default.
- W1983910633 countsByYear W19839106332012 @default.
- W1983910633 countsByYear W19839106332013 @default.
- W1983910633 countsByYear W19839106332014 @default.
- W1983910633 countsByYear W19839106332015 @default.
- W1983910633 countsByYear W19839106332016 @default.
- W1983910633 countsByYear W19839106332017 @default.
- W1983910633 countsByYear W19839106332018 @default.
- W1983910633 countsByYear W19839106332019 @default.
- W1983910633 countsByYear W19839106332020 @default.
- W1983910633 countsByYear W19839106332021 @default.
- W1983910633 countsByYear W19839106332022 @default.
- W1983910633 countsByYear W19839106332023 @default.
- W1983910633 crossrefType "journal-article" @default.
- W1983910633 hasAuthorship W1983910633A5038018657 @default.
- W1983910633 hasAuthorship W1983910633A5053093918 @default.
- W1983910633 hasAuthorship W1983910633A5075084445 @default.
- W1983910633 hasAuthorship W1983910633A5079868959 @default.
- W1983910633 hasConcept C113196181 @default.
- W1983910633 hasConcept C120665830 @default.
- W1983910633 hasConcept C121332964 @default.
- W1983910633 hasConcept C144082473 @default.
- W1983910633 hasConcept C145148216 @default.
- W1983910633 hasConcept C147789679 @default.
- W1983910633 hasConcept C159467904 @default.
- W1983910633 hasConcept C171250308 @default.
- W1983910633 hasConcept C178790620 @default.
- W1983910633 hasConcept C185592680 @default.
- W1983910633 hasConcept C191486275 @default.
- W1983910633 hasConcept C191897082 @default.
- W1983910633 hasConcept C192562407 @default.
- W1983910633 hasConcept C199289684 @default.
- W1983910633 hasConcept C2777174998 @default.
- W1983910633 hasConcept C2779227376 @default.
- W1983910633 hasConcept C2779851234 @default.
- W1983910633 hasConcept C2780634616 @default.
- W1983910633 hasConcept C43617362 @default.
- W1983910633 hasConcept C49040817 @default.
- W1983910633 hasConcept C544956773 @default.
- W1983910633 hasConcept C56052488 @default.
- W1983910633 hasConcept C8010536 @default.
- W1983910633 hasConceptScore W1983910633C113196181 @default.
- W1983910633 hasConceptScore W1983910633C120665830 @default.
- W1983910633 hasConceptScore W1983910633C121332964 @default.
- W1983910633 hasConceptScore W1983910633C144082473 @default.
- W1983910633 hasConceptScore W1983910633C145148216 @default.
- W1983910633 hasConceptScore W1983910633C147789679 @default.
- W1983910633 hasConceptScore W1983910633C159467904 @default.
- W1983910633 hasConceptScore W1983910633C171250308 @default.
- W1983910633 hasConceptScore W1983910633C178790620 @default.
- W1983910633 hasConceptScore W1983910633C185592680 @default.
- W1983910633 hasConceptScore W1983910633C191486275 @default.
- W1983910633 hasConceptScore W1983910633C191897082 @default.
- W1983910633 hasConceptScore W1983910633C192562407 @default.
- W1983910633 hasConceptScore W1983910633C199289684 @default.
- W1983910633 hasConceptScore W1983910633C2777174998 @default.
- W1983910633 hasConceptScore W1983910633C2779227376 @default.
- W1983910633 hasConceptScore W1983910633C2779851234 @default.
- W1983910633 hasConceptScore W1983910633C2780634616 @default.
- W1983910633 hasConceptScore W1983910633C43617362 @default.
- W1983910633 hasConceptScore W1983910633C49040817 @default.
- W1983910633 hasConceptScore W1983910633C544956773 @default.
- W1983910633 hasConceptScore W1983910633C56052488 @default.
- W1983910633 hasConceptScore W1983910633C8010536 @default.
- W1983910633 hasIssue "1-2" @default.
- W1983910633 hasLocation W19839106331 @default.
- W1983910633 hasOpenAccess W1983910633 @default.