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- W1984032252 abstract "The CVD growth of SiC thin films using hexamethyldisilane (HMDS) as the singular precursor on Si substrates with an AlN nucleation layer was explored in this study. A statistically designed experiment was used to conclude that growth temperature has the largest impact on crystal quality and surface microstructure. In addition to crystal quality, wafer bow was studied. Crystal quality and growth rate are loosely correlated to wafer bow in our study. SEM surface microstructural analysis of the SiC films shows a changing microstructure with growth temperature consistent changes in measured crystal quality. TEM studies reveal that the films are the 3C polytype having a high density of planar faults." @default.
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- W1984032252 date "2012-05-01" @default.
- W1984032252 modified "2023-10-14" @default.
- W1984032252 title "Low Temperature Epitaxy of 3C SiC Using Hexamethyldisilane Precursor on Si <111> Substrates" @default.
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- W1984032252 doi "https://doi.org/10.4028/www.scientific.net/msf.717-720.185" @default.
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