Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984039083> ?p ?o ?g. }
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97
with 100 items per page.
- W1984039083 endingPage "114" @default.
- W1984039083 startingPage "108" @default.
- W1984039083 abstract "Substrate temperature dependencies of growth rate and surface hydrogen coverage for Si GSMBE using Si2H6 have been obtained experimentally. Validity of a growth model has been confirmed by comparing the model prediction with the experimental data. The Si growth can be described as a combination of the Si2H6 adsorption and the surface-hydrogen desorption. A Si2H6 molecule adsorbs on a Si(1 0 0) surface consuming two available dangling bonds, while the desorption of surface hydrogen is characterized as a first-order reaction." @default.
- W1984039083 created "2016-06-24" @default.
- W1984039083 creator A5073937959 @default.
- W1984039083 date "1997-08-01" @default.
- W1984039083 modified "2023-09-27" @default.
- W1984039083 title "Modeling growth in Si gas-source molecular beam epitaxy using Si2H6" @default.
- W1984039083 cites W1966771346 @default.
- W1984039083 cites W1976076762 @default.
- W1984039083 cites W1978355978 @default.
- W1984039083 cites W1998828561 @default.
- W1984039083 cites W2010737596 @default.
- W1984039083 cites W2021752964 @default.
- W1984039083 cites W2037214643 @default.
- W1984039083 cites W2043533087 @default.
- W1984039083 cites W2050737454 @default.
- W1984039083 cites W2053768446 @default.
- W1984039083 cites W2071412196 @default.
- W1984039083 cites W2072821703 @default.
- W1984039083 cites W2088136445 @default.
- W1984039083 cites W2090341575 @default.
- W1984039083 cites W2125501758 @default.
- W1984039083 doi "https://doi.org/10.1016/s0022-0248(97)00092-4" @default.
- W1984039083 hasPublicationYear "1997" @default.
- W1984039083 type Work @default.
- W1984039083 sameAs 1984039083 @default.
- W1984039083 citedByCount "18" @default.
- W1984039083 countsByYear W19840390832016 @default.
- W1984039083 countsByYear W19840390832017 @default.
- W1984039083 crossrefType "journal-article" @default.
- W1984039083 hasAuthorship W1984039083A5073937959 @default.
- W1984039083 hasConcept C110738630 @default.
- W1984039083 hasConcept C111368507 @default.
- W1984039083 hasConcept C113196181 @default.
- W1984039083 hasConcept C127313418 @default.
- W1984039083 hasConcept C147789679 @default.
- W1984039083 hasConcept C150394285 @default.
- W1984039083 hasConcept C159467904 @default.
- W1984039083 hasConcept C162711632 @default.
- W1984039083 hasConcept C178790620 @default.
- W1984039083 hasConcept C185592680 @default.
- W1984039083 hasConcept C192562407 @default.
- W1984039083 hasConcept C2524010 @default.
- W1984039083 hasConcept C2777289219 @default.
- W1984039083 hasConcept C2778312390 @default.
- W1984039083 hasConcept C2779227376 @default.
- W1984039083 hasConcept C32424582 @default.
- W1984039083 hasConcept C32909587 @default.
- W1984039083 hasConcept C33923547 @default.
- W1984039083 hasConcept C3792809 @default.
- W1984039083 hasConcept C512968161 @default.
- W1984039083 hasConcept C54419926 @default.
- W1984039083 hasConcept C544956773 @default.
- W1984039083 hasConcept C9950777 @default.
- W1984039083 hasConceptScore W1984039083C110738630 @default.
- W1984039083 hasConceptScore W1984039083C111368507 @default.
- W1984039083 hasConceptScore W1984039083C113196181 @default.
- W1984039083 hasConceptScore W1984039083C127313418 @default.
- W1984039083 hasConceptScore W1984039083C147789679 @default.
- W1984039083 hasConceptScore W1984039083C150394285 @default.
- W1984039083 hasConceptScore W1984039083C159467904 @default.
- W1984039083 hasConceptScore W1984039083C162711632 @default.
- W1984039083 hasConceptScore W1984039083C178790620 @default.
- W1984039083 hasConceptScore W1984039083C185592680 @default.
- W1984039083 hasConceptScore W1984039083C192562407 @default.
- W1984039083 hasConceptScore W1984039083C2524010 @default.
- W1984039083 hasConceptScore W1984039083C2777289219 @default.
- W1984039083 hasConceptScore W1984039083C2778312390 @default.
- W1984039083 hasConceptScore W1984039083C2779227376 @default.
- W1984039083 hasConceptScore W1984039083C32424582 @default.
- W1984039083 hasConceptScore W1984039083C32909587 @default.
- W1984039083 hasConceptScore W1984039083C33923547 @default.
- W1984039083 hasConceptScore W1984039083C3792809 @default.
- W1984039083 hasConceptScore W1984039083C512968161 @default.
- W1984039083 hasConceptScore W1984039083C54419926 @default.
- W1984039083 hasConceptScore W1984039083C544956773 @default.
- W1984039083 hasConceptScore W1984039083C9950777 @default.
- W1984039083 hasIssue "1-2" @default.
- W1984039083 hasLocation W19840390831 @default.
- W1984039083 hasOpenAccess W1984039083 @default.
- W1984039083 hasPrimaryLocation W19840390831 @default.
- W1984039083 hasRelatedWork W1971028342 @default.
- W1984039083 hasRelatedWork W1989513975 @default.
- W1984039083 hasRelatedWork W1993141630 @default.
- W1984039083 hasRelatedWork W2010700713 @default.
- W1984039083 hasRelatedWork W2036001131 @default.
- W1984039083 hasRelatedWork W2038802737 @default.
- W1984039083 hasRelatedWork W2062525139 @default.
- W1984039083 hasRelatedWork W2076009693 @default.
- W1984039083 hasRelatedWork W2078649348 @default.
- W1984039083 hasRelatedWork W2172016922 @default.
- W1984039083 hasVolume "179" @default.
- W1984039083 isParatext "false" @default.
- W1984039083 isRetracted "false" @default.
- W1984039083 magId "1984039083" @default.
- W1984039083 workType "article" @default.