FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984128169> ?p ?o ?g. }

• W1984128169 abstract "Optical lithography has been the key for continuous size reduction of semiconductor devices and circuits manufacturing. Although the industry is continually improving the resolution, optical lithography becomes moredifficult and less cost effective in satisfying the ever increasing demands in nano-manufacturing. Besides manufacturing,the dramatic advancements in nanoscale science and engineering also call an urgent need for high-throughputnano-fabrication technologies that are versatile to frequent design changes. Here we experimentally demonstrated thecapability of patterning with 50 nm linewidth with a high flying speed at 10 meter/second. This low-cost nano-fabricationscheme has the potential of a few orders of magnitude higher throughput than current maskless techniques, and promises anew route towards the next generation nano-manufacturing. Besides its application in nanolithography, this technique can also be used for nanoscale metrology, imaging and data storage." @default.
• W1984128169 created "2016-06-24" @default.
• W1984128169 creator A5000336995 @default.
• W1984128169 creator A5011847790 @default.
• W1984128169 creator A5029138959 @default.
• W1984128169 creator A5031804038 @default.
• W1984128169 creator A5049797831 @default.
• W1984128169 creator A5075652868 @default.
• W1984128169 creator A5084588603 @default.
• W1984128169 creator A5085059674 @default.
• W1984128169 date "2010-03-11" @default.
• W1984128169 modified "2023-09-23" @default.
• W1984128169 title "Flying plasmonic lens at near field for high speed nanolithography" @default.
• W1984128169 doi "https://doi.org/10.1117/12.848370" @default.
• W1984128169 hasPublicationYear "2010" @default.
• W1984128169 type Work @default.
• W1984128169 sameAs 1984128169 @default.
• W1984128169 citedByCount "4" @default.
• W1984128169 countsByYear W19841281692013 @default.
• W1984128169 countsByYear W19841281692014 @default.
• W1984128169 countsByYear W19841281692017 @default.
• W1984128169 crossrefType "proceedings-article" @default.
• W1984128169 hasAuthorship W1984128169A5000336995 @default.
• W1984128169 hasAuthorship W1984128169A5011847790 @default.
• W1984128169 hasAuthorship W1984128169A5029138959 @default.
• W1984128169 hasAuthorship W1984128169A5031804038 @default.
• W1984128169 hasAuthorship W1984128169A5049797831 @default.
• W1984128169 hasAuthorship W1984128169A5075652868 @default.
• W1984128169 hasAuthorship W1984128169A5084588603 @default.
• W1984128169 hasAuthorship W1984128169A5085059674 @default.
• W1984128169 hasConcept C105487726 @default.
• W1984128169 hasConcept C110879396 @default.
• W1984128169 hasConcept C120665830 @default.
• W1984128169 hasConcept C121332964 @default.
• W1984128169 hasConcept C136525101 @default.
• W1984128169 hasConcept C142181693 @default.
• W1984128169 hasConcept C142724271 @default.
• W1984128169 hasConcept C157764524 @default.
• W1984128169 hasConcept C160671074 @default.
• W1984128169 hasConcept C162117346 @default.
• W1984128169 hasConcept C163581340 @default.
• W1984128169 hasConcept C171250308 @default.
• W1984128169 hasConcept C192562407 @default.
• W1984128169 hasConcept C195766429 @default.
• W1984128169 hasConcept C200274948 @default.
• W1984128169 hasConcept C204223013 @default.
• W1984128169 hasConcept C204787440 @default.
• W1984128169 hasConcept C2779227376 @default.
• W1984128169 hasConcept C41008148 @default.
• W1984128169 hasConcept C46312889 @default.
• W1984128169 hasConcept C49040817 @default.
• W1984128169 hasConcept C520434653 @default.
• W1984128169 hasConcept C53524968 @default.
• W1984128169 hasConcept C555944384 @default.
• W1984128169 hasConcept C66018809 @default.
• W1984128169 hasConcept C71924100 @default.
• W1984128169 hasConcept C76155785 @default.
• W1984128169 hasConceptScore W1984128169C105487726 @default.
• W1984128169 hasConceptScore W1984128169C110879396 @default.
• W1984128169 hasConceptScore W1984128169C120665830 @default.
• W1984128169 hasConceptScore W1984128169C121332964 @default.
• W1984128169 hasConceptScore W1984128169C136525101 @default.
• W1984128169 hasConceptScore W1984128169C142181693 @default.
• W1984128169 hasConceptScore W1984128169C142724271 @default.
• W1984128169 hasConceptScore W1984128169C157764524 @default.
• W1984128169 hasConceptScore W1984128169C160671074 @default.
• W1984128169 hasConceptScore W1984128169C162117346 @default.
• W1984128169 hasConceptScore W1984128169C163581340 @default.
• W1984128169 hasConceptScore W1984128169C171250308 @default.
• W1984128169 hasConceptScore W1984128169C192562407 @default.
• W1984128169 hasConceptScore W1984128169C195766429 @default.
• W1984128169 hasConceptScore W1984128169C200274948 @default.
• W1984128169 hasConceptScore W1984128169C204223013 @default.
• W1984128169 hasConceptScore W1984128169C204787440 @default.
• W1984128169 hasConceptScore W1984128169C2779227376 @default.
• W1984128169 hasConceptScore W1984128169C41008148 @default.
• W1984128169 hasConceptScore W1984128169C46312889 @default.
• W1984128169 hasConceptScore W1984128169C49040817 @default.
• W1984128169 hasConceptScore W1984128169C520434653 @default.
• W1984128169 hasConceptScore W1984128169C53524968 @default.
• W1984128169 hasConceptScore W1984128169C555944384 @default.
• W1984128169 hasConceptScore W1984128169C66018809 @default.
• W1984128169 hasConceptScore W1984128169C71924100 @default.
• W1984128169 hasConceptScore W1984128169C76155785 @default.
• W1984128169 hasLocation W19841281691 @default.
• W1984128169 hasOpenAccess W1984128169 @default.
• W1984128169 hasPrimaryLocation W19841281691 @default.
• W1984128169 hasRelatedWork W1056900014 @default.
• W1984128169 hasRelatedWork W1616196646 @default.
• W1984128169 hasRelatedWork W1970469634 @default.
• W1984128169 hasRelatedWork W1977539907 @default.
• W1984128169 hasRelatedWork W1980082708 @default.
• W1984128169 hasRelatedWork W1981494233 @default.
• W1984128169 hasRelatedWork W1996725054 @default.
• W1984128169 hasRelatedWork W1999291723 @default.
• W1984128169 hasRelatedWork W2043907410 @default.
• W1984128169 hasRelatedWork W2053210666 @default.
• W1984128169 hasRelatedWork W2063804843 @default.
• W1984128169 hasRelatedWork W2081507162 @default.
• W1984128169 hasRelatedWork W2086098326 @default.

• next