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- W1984179957 abstract "Stress migration behaviors in Tungsten (W) films were investigated according to morphological characteristics and residual stress analysis. Results show that stress relaxtion induced formation of voids and hillocks strips, which resembles the void / hillock pair observed in Cu film electromigration experiments. Analysis indicate that the formation of chocolate sphere shaped W hillocks is intimately related to the atoms diffusivity." @default.
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- W1984179957 date "2011-08-01" @default.
- W1984179957 modified "2023-09-26" @default.
- W1984179957 title "Stress Migration Induced Formation of Voids / Hillocks in Tungsten Films" @default.
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- W1984179957 doi "https://doi.org/10.4028/www.scientific.net/amr.311-313.1831" @default.
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