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- W1984179991 abstract "The performance of a dimensional surface-measuring instrument is usually limited by a small number of critical components or specifications. For example, parameters such as those specifying ranges and resolutions, and probe geometry are needed to define the capabilities of the instrument. The response of the instrument to sinusoidal perturbations of varying amplitude and wavelength, can be mapped in amplitude-wavelength space to show the effect of each parameter and the overall limits of performance." @default.
- W1984179991 created "2016-06-24" @default.
- W1984179991 creator A5003423249 @default.
- W1984179991 date "1987-01-11" @default.
- W1984179991 modified "2023-09-23" @default.
- W1984179991 title "Mapping The Performance Of Surface-Measuring Instruments" @default.
- W1984179991 doi "https://doi.org/10.1117/12.941285" @default.
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