Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984255444> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1984255444 endingPage "904" @default.
- W1984255444 startingPage "901" @default.
- W1984255444 abstract "A review of the newly developed ion sources for implantation application is presented. These ion sources include Bernas ion source and electron cyclotron resonance (ECR) ion source. They have advantages of source lifetimes and yields of multiply charged ion-beam current. Typical lifetime of Bernas source is 100 h and the ratio of As2+/As+ is about 25% with wide range beam current controllability. Lifetime of the ECR source is more than 150 h and the ratio of As2+/As+ beams is about 50%. The characteristics of these ion sources for the ion implantation system are also presented on actual uses in factories." @default.
- W1984255444 created "2016-06-24" @default.
- W1984255444 creator A5032790180 @default.
- W1984255444 creator A5050598012 @default.
- W1984255444 date "1996-03-01" @default.
- W1984255444 modified "2023-09-23" @default.
- W1984255444 title "Ion sources for implantation application (invited)" @default.
- W1984255444 cites W1986857990 @default.
- W1984255444 cites W1999400881 @default.
- W1984255444 cites W2008051441 @default.
- W1984255444 cites W2059858168 @default.
- W1984255444 doi "https://doi.org/10.1063/1.1146833" @default.
- W1984255444 hasPublicationYear "1996" @default.
- W1984255444 type Work @default.
- W1984255444 sameAs 1984255444 @default.
- W1984255444 citedByCount "5" @default.
- W1984255444 countsByYear W19842554442013 @default.
- W1984255444 countsByYear W19842554442014 @default.
- W1984255444 crossrefType "journal-article" @default.
- W1984255444 hasAuthorship W1984255444A5032790180 @default.
- W1984255444 hasAuthorship W1984255444A5050598012 @default.
- W1984255444 hasConcept C107920040 @default.
- W1984255444 hasConcept C120665830 @default.
- W1984255444 hasConcept C121332964 @default.
- W1984255444 hasConcept C145148216 @default.
- W1984255444 hasConcept C148043351 @default.
- W1984255444 hasConcept C159985019 @default.
- W1984255444 hasConcept C168834538 @default.
- W1984255444 hasConcept C175361016 @default.
- W1984255444 hasConcept C184779094 @default.
- W1984255444 hasConcept C188224857 @default.
- W1984255444 hasConcept C192562407 @default.
- W1984255444 hasConcept C204323151 @default.
- W1984255444 hasConcept C2778220808 @default.
- W1984255444 hasConcept C41823505 @default.
- W1984255444 hasConcept C50774322 @default.
- W1984255444 hasConcept C62520636 @default.
- W1984255444 hasConcept C93106096 @default.
- W1984255444 hasConcept C97355855 @default.
- W1984255444 hasConceptScore W1984255444C107920040 @default.
- W1984255444 hasConceptScore W1984255444C120665830 @default.
- W1984255444 hasConceptScore W1984255444C121332964 @default.
- W1984255444 hasConceptScore W1984255444C145148216 @default.
- W1984255444 hasConceptScore W1984255444C148043351 @default.
- W1984255444 hasConceptScore W1984255444C159985019 @default.
- W1984255444 hasConceptScore W1984255444C168834538 @default.
- W1984255444 hasConceptScore W1984255444C175361016 @default.
- W1984255444 hasConceptScore W1984255444C184779094 @default.
- W1984255444 hasConceptScore W1984255444C188224857 @default.
- W1984255444 hasConceptScore W1984255444C192562407 @default.
- W1984255444 hasConceptScore W1984255444C204323151 @default.
- W1984255444 hasConceptScore W1984255444C2778220808 @default.
- W1984255444 hasConceptScore W1984255444C41823505 @default.
- W1984255444 hasConceptScore W1984255444C50774322 @default.
- W1984255444 hasConceptScore W1984255444C62520636 @default.
- W1984255444 hasConceptScore W1984255444C93106096 @default.
- W1984255444 hasConceptScore W1984255444C97355855 @default.
- W1984255444 hasIssue "3" @default.
- W1984255444 hasLocation W19842554441 @default.
- W1984255444 hasOpenAccess W1984255444 @default.
- W1984255444 hasPrimaryLocation W19842554441 @default.
- W1984255444 hasRelatedWork W1495609493 @default.
- W1984255444 hasRelatedWork W1638028398 @default.
- W1984255444 hasRelatedWork W1970225414 @default.
- W1984255444 hasRelatedWork W1978936450 @default.
- W1984255444 hasRelatedWork W2027550879 @default.
- W1984255444 hasRelatedWork W2034831498 @default.
- W1984255444 hasRelatedWork W2091016158 @default.
- W1984255444 hasRelatedWork W2184847577 @default.
- W1984255444 hasRelatedWork W3104899041 @default.
- W1984255444 hasRelatedWork W3217385227 @default.
- W1984255444 hasVolume "67" @default.
- W1984255444 isParatext "false" @default.
- W1984255444 isRetracted "false" @default.
- W1984255444 magId "1984255444" @default.
- W1984255444 workType "article" @default.