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• W1984302543 endingPage "7870" @default.
• W1984302543 startingPage "7864" @default.
• W1984302543 abstract "Radiofrequency (13.56 MHz) plasma enhanced chemical vapor deposition process is used for deposition of SiOx films on bell metal substrates using Ar/hexamethyldisiloxane/O2 glow discharge. The DC self-bias voltage developed on the substrates is observed to be varied from − 35 V to − 115 V depending on the RF power applied to the plasma. Plasma potential measurements during film deposition process are carried out by self-compensated emissive probe. The deposited films are characterized by Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), nanoindentation, nano-scratch test and thermogravimetric analysis. The characterization results show strong dependency of the SiOx films properties on the energy of the ions impinging on the substrates during deposition. Analysis of Raman spectra indicates an increase in vitreous silica content and reduction in defective Si–O–Si chemical structure in the deposited SiOx films with increasing ion energy impinging on the substrates. The increase in inorganic (Si and O) content in the SiOx films is further confirmed from XPS analysis. The growth of SiOx films with more inorganic content and defect free chemical structure apparently contribute to the increase in their hardness and scratch resistance behavior. The films show higher thermal stability as the energy of the ions arriving at substrates increases with DC self-bias voltage. The possibility of using SiOx films for surface protection of bell metal is also explored." @default.
• W1984302543 created "2016-06-24" @default.
• W1984302543 creator A5008495988 @default.
• W1984302543 creator A5011203807 @default.
• W1984302543 creator A5027021529 @default.
• W1984302543 creator A5034568180 @default.
• W1984302543 creator A5040306788 @default.
• W1984302543 creator A5042301045 @default.
• W1984302543 creator A5048695270 @default.
• W1984302543 creator A5051947465 @default.
• W1984302543 creator A5067510212 @default.
• W1984302543 creator A5087455222 @default.
• W1984302543 date "2011-09-01" @default.
• W1984302543 modified "2023-10-16" @default.
• W1984302543 title "Effect of impinging ion energy on the substrates during deposition of SiOx films by radiofrequency plasma enhanced chemical vapor deposition process" @default.
• W1984302543 cites W1964079778 @default.
• W1984302543 cites W1969237925 @default.
• W1984302543 cites W1971597640 @default.
• W1984302543 cites W1974007894 @default.
• W1984302543 cites W1999983836 @default.
• W1984302543 cites W2000456590 @default.
• W1984302543 cites W2005332140 @default.
• W1984302543 cites W2014243906 @default.
• W1984302543 cites W2022350187 @default.
• W1984302543 cites W2026774595 @default.
• W1984302543 cites W2028401570 @default.
• W1984302543 cites W2032810834 @default.
• W1984302543 cites W2049530034 @default.
• W1984302543 cites W2049882575 @default.
• W1984302543 cites W2051746813 @default.
• W1984302543 cites W2059419659 @default.
• W1984302543 cites W2070716683 @default.
• W1984302543 cites W2071962784 @default.
• W1984302543 cites W2075236045 @default.
• W1984302543 cites W2078193303 @default.
• W1984302543 cites W2083057440 @default.
• W1984302543 cites W2083537294 @default.
• W1984302543 cites W2085895297 @default.
• W1984302543 cites W2171167806 @default.
• W1984302543 doi "https://doi.org/10.1016/j.tsf.2011.05.079" @default.
• W1984302543 hasPublicationYear "2011" @default.
• W1984302543 type Work @default.
• W1984302543 sameAs 1984302543 @default.
• W1984302543 citedByCount "10" @default.
• W1984302543 countsByYear W19843025432013 @default.
• W1984302543 countsByYear W19843025432015 @default.
• W1984302543 countsByYear W19843025432017 @default.
• W1984302543 countsByYear W19843025432018 @default.
• W1984302543 countsByYear W19843025432020 @default.
• W1984302543 countsByYear W19843025432021 @default.
• W1984302543 crossrefType "journal-article" @default.
• W1984302543 hasAuthorship W1984302543A5008495988 @default.
• W1984302543 hasAuthorship W1984302543A5011203807 @default.
• W1984302543 hasAuthorship W1984302543A5027021529 @default.
• W1984302543 hasAuthorship W1984302543A5034568180 @default.
• W1984302543 hasAuthorship W1984302543A5040306788 @default.
• W1984302543 hasAuthorship W1984302543A5042301045 @default.
• W1984302543 hasAuthorship W1984302543A5048695270 @default.
• W1984302543 hasAuthorship W1984302543A5051947465 @default.
• W1984302543 hasAuthorship W1984302543A5067510212 @default.
• W1984302543 hasAuthorship W1984302543A5087455222 @default.
• W1984302543 hasConcept C113196181 @default.
• W1984302543 hasConcept C120665830 @default.
• W1984302543 hasConcept C121332964 @default.
• W1984302543 hasConcept C127413603 @default.
• W1984302543 hasConcept C145148216 @default.
• W1984302543 hasConcept C151730666 @default.
• W1984302543 hasConcept C159985019 @default.
• W1984302543 hasConcept C171250308 @default.
• W1984302543 hasConcept C175708663 @default.
• W1984302543 hasConcept C178790620 @default.
• W1984302543 hasConcept C185592680 @default.
• W1984302543 hasConcept C19067145 @default.
• W1984302543 hasConcept C192562407 @default.
• W1984302543 hasConcept C2776551725 @default.
• W1984302543 hasConcept C2781463530 @default.
• W1984302543 hasConcept C2816523 @default.
• W1984302543 hasConcept C38347018 @default.
• W1984302543 hasConcept C40003534 @default.
• W1984302543 hasConcept C42360764 @default.
• W1984302543 hasConcept C49326732 @default.
• W1984302543 hasConcept C50774322 @default.
• W1984302543 hasConcept C57410435 @default.
• W1984302543 hasConcept C62520636 @default.
• W1984302543 hasConcept C64297162 @default.
• W1984302543 hasConcept C75937256 @default.
• W1984302543 hasConcept C82706917 @default.
• W1984302543 hasConcept C86803240 @default.
• W1984302543 hasConceptScore W1984302543C113196181 @default.
• W1984302543 hasConceptScore W1984302543C120665830 @default.
• W1984302543 hasConceptScore W1984302543C121332964 @default.
• W1984302543 hasConceptScore W1984302543C127413603 @default.
• W1984302543 hasConceptScore W1984302543C145148216 @default.
• W1984302543 hasConceptScore W1984302543C151730666 @default.
• W1984302543 hasConceptScore W1984302543C159985019 @default.
• W1984302543 hasConceptScore W1984302543C171250308 @default.
• W1984302543 hasConceptScore W1984302543C175708663 @default.
• W1984302543 hasConceptScore W1984302543C178790620 @default.

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