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- W1984328175 abstract "The charging and etching effects of hydride and fluoride gases in plasma immersion ion implantation (PIII) doping experiments have been investigated. Both phenomena can affect implant profile and dose, alter device structure, and degrade device reliability. In addition, charge accumulation significantly reduces implant energy. Helium is a good choice as a diluting gas for PIII doping processes due to its low ionization rate, inertness, and minimal etching and charging effects." @default.
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- W1984328175 date "1995-12-01" @default.
- W1984328175 modified "2023-10-14" @default.
- W1984328175 title "An investigation of dopant gases in plasma immersion ion implantation" @default.
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- W1984328175 doi "https://doi.org/10.1016/0168-583x(95)00779-2" @default.
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