Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984348518> ?p ?o ?g. }
- W1984348518 endingPage "1765" @default.
- W1984348518 startingPage "1757" @default.
- W1984348518 abstract "HfTaO-based MOS capacitors with different top electrode (Ag、Au、Pt) were successfully fabricated by dual ion beam sputtering deposition (DIBSD). We presented the effect of different metal gate on the capacity, flat band voltage shift, leakage current and conduction mechanism. It has been found that the Pt-electrode capacitor exhibited the highest accumulation capacitance. In addition, the largest hysteresis loop in Pt/HfTaO/Si capacitor during the forward-and-reverse voltage sweeping from +2.5V to -2.5V was observed. The result indicates the presence of a large amount of fixed charges or oxygen vacancies exist in interface Pt/HfTaO, which is consistent with the prediction from Qf results. It is proved that even though E ot of the Pt-electrode capacitor is lower than that of the Ag, Au-electroded, and that of leakage current still has the smallest value at a high electric field due to Pt with a high enough work function Φ ms (Pt)=5.65eV." @default.
- W1984348518 created "2016-06-24" @default.
- W1984348518 creator A5007792767 @default.
- W1984348518 creator A5013172457 @default.
- W1984348518 creator A5043308642 @default.
- W1984348518 date "2011-02-01" @default.
- W1984348518 modified "2023-09-25" @default.
- W1984348518 title "Influence of Metal Electrode(Ag,Au,Pt) on the Dielectric and Electrical Properties of HfTaO Capacitors" @default.
- W1984348518 cites W1665591746 @default.
- W1984348518 cites W1678123030 @default.
- W1984348518 cites W1961041432 @default.
- W1984348518 cites W1982999481 @default.
- W1984348518 cites W1986597485 @default.
- W1984348518 cites W1993664112 @default.
- W1984348518 cites W2001799651 @default.
- W1984348518 cites W2015135991 @default.
- W1984348518 cites W2016791517 @default.
- W1984348518 cites W2026870577 @default.
- W1984348518 cites W2027346712 @default.
- W1984348518 cites W2037456111 @default.
- W1984348518 cites W2039862724 @default.
- W1984348518 cites W2042492664 @default.
- W1984348518 cites W2045519530 @default.
- W1984348518 cites W2047432943 @default.
- W1984348518 cites W2059489675 @default.
- W1984348518 cites W2064965581 @default.
- W1984348518 cites W2082567102 @default.
- W1984348518 cites W2082578566 @default.
- W1984348518 cites W2084196976 @default.
- W1984348518 cites W2112340566 @default.
- W1984348518 cites W2114948497 @default.
- W1984348518 cites W2136556829 @default.
- W1984348518 cites W2146430619 @default.
- W1984348518 cites W2149310887 @default.
- W1984348518 cites W2149462507 @default.
- W1984348518 cites W2150052292 @default.
- W1984348518 cites W2151129148 @default.
- W1984348518 cites W2158101245 @default.
- W1984348518 doi "https://doi.org/10.4028/www.scientific.net/amr.197-198.1757" @default.
- W1984348518 hasPublicationYear "2011" @default.
- W1984348518 type Work @default.
- W1984348518 sameAs 1984348518 @default.
- W1984348518 citedByCount "0" @default.
- W1984348518 crossrefType "journal-article" @default.
- W1984348518 hasAuthorship W1984348518A5007792767 @default.
- W1984348518 hasAuthorship W1984348518A5013172457 @default.
- W1984348518 hasAuthorship W1984348518A5043308642 @default.
- W1984348518 hasConcept C115235246 @default.
- W1984348518 hasConcept C119599485 @default.
- W1984348518 hasConcept C121332964 @default.
- W1984348518 hasConcept C123299182 @default.
- W1984348518 hasConcept C127413603 @default.
- W1984348518 hasConcept C133386390 @default.
- W1984348518 hasConcept C139719470 @default.
- W1984348518 hasConcept C147789679 @default.
- W1984348518 hasConcept C162324750 @default.
- W1984348518 hasConcept C165801399 @default.
- W1984348518 hasConcept C17525397 @default.
- W1984348518 hasConcept C185592680 @default.
- W1984348518 hasConcept C191897082 @default.
- W1984348518 hasConcept C192562407 @default.
- W1984348518 hasConcept C26873012 @default.
- W1984348518 hasConcept C2777042071 @default.
- W1984348518 hasConcept C30066665 @default.
- W1984348518 hasConcept C49040817 @default.
- W1984348518 hasConcept C52192207 @default.
- W1984348518 hasConcept C544153396 @default.
- W1984348518 hasConceptScore W1984348518C115235246 @default.
- W1984348518 hasConceptScore W1984348518C119599485 @default.
- W1984348518 hasConceptScore W1984348518C121332964 @default.
- W1984348518 hasConceptScore W1984348518C123299182 @default.
- W1984348518 hasConceptScore W1984348518C127413603 @default.
- W1984348518 hasConceptScore W1984348518C133386390 @default.
- W1984348518 hasConceptScore W1984348518C139719470 @default.
- W1984348518 hasConceptScore W1984348518C147789679 @default.
- W1984348518 hasConceptScore W1984348518C162324750 @default.
- W1984348518 hasConceptScore W1984348518C165801399 @default.
- W1984348518 hasConceptScore W1984348518C17525397 @default.
- W1984348518 hasConceptScore W1984348518C185592680 @default.
- W1984348518 hasConceptScore W1984348518C191897082 @default.
- W1984348518 hasConceptScore W1984348518C192562407 @default.
- W1984348518 hasConceptScore W1984348518C26873012 @default.
- W1984348518 hasConceptScore W1984348518C2777042071 @default.
- W1984348518 hasConceptScore W1984348518C30066665 @default.
- W1984348518 hasConceptScore W1984348518C49040817 @default.
- W1984348518 hasConceptScore W1984348518C52192207 @default.
- W1984348518 hasConceptScore W1984348518C544153396 @default.
- W1984348518 hasLocation W19843485181 @default.
- W1984348518 hasOpenAccess W1984348518 @default.
- W1984348518 hasPrimaryLocation W19843485181 @default.
- W1984348518 hasRelatedWork W1990666957 @default.
- W1984348518 hasRelatedWork W2018820683 @default.
- W1984348518 hasRelatedWork W2143128254 @default.
- W1984348518 hasRelatedWork W2164607314 @default.
- W1984348518 hasRelatedWork W2324197978 @default.
- W1984348518 hasRelatedWork W2522130757 @default.
- W1984348518 hasRelatedWork W2888296733 @default.
- W1984348518 hasRelatedWork W4253731651 @default.