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- W1984361505 abstract "The performance characteristics of a microelectronic device depend on the physical structure of the device. The device structure fabrication process involves lithography imaging and etching steps using photomasks. A mask with defects may lead to a device structure that deviates from intended geometry. The device structure deviation may result in inferior device performance. To ensure desired device performance from a fabricated device, a mask inspection is performed to dispose defective masks that may result in device structures with inferior device performance. The disposition decision is currently based on defect size and other properties seen at the mask level. By using lithography simulation based technology, the defect printability is also considered in defect disposition. However, the defect size and other properties at the mask level and even defect printability at wafer level may or may not lead to device structures with inferior performance. Such an early disposition decision could be very costly because repair process is time consuming, not all defects are repairable, and repair may introduce new defects. To improve the defect disposition, we present a new flow and method that is based on process simulation and device performance modeling using photomask inspection image. Our case study shows two defects both classified as killer defects by defect printability have very different impact on device performance." @default.
- W1984361505 created "2016-06-24" @default.
- W1984361505 creator A5004759804 @default.
- W1984361505 creator A5011872184 @default.
- W1984361505 date "2004-05-24" @default.
- W1984361505 modified "2023-10-18" @default.
- W1984361505 title "Photomask disposition based on simulated device performance" @default.
- W1984361505 cites W1976474917 @default.
- W1984361505 cites W1976739984 @default.
- W1984361505 cites W1984636709 @default.
- W1984361505 cites W1994911046 @default.
- W1984361505 cites W2013594656 @default.
- W1984361505 cites W2015931194 @default.
- W1984361505 cites W2047702851 @default.
- W1984361505 cites W2061759695 @default.
- W1984361505 cites W2062544977 @default.
- W1984361505 cites W2069136067 @default.
- W1984361505 cites W2074870341 @default.
- W1984361505 cites W2089787077 @default.
- W1984361505 cites W2093163496 @default.
- W1984361505 cites W2116721568 @default.
- W1984361505 cites W2486442804 @default.
- W1984361505 doi "https://doi.org/10.1117/12.536588" @default.
- W1984361505 hasPublicationYear "2004" @default.
- W1984361505 type Work @default.
- W1984361505 sameAs 1984361505 @default.
- W1984361505 citedByCount "0" @default.
- W1984361505 crossrefType "proceedings-article" @default.
- W1984361505 hasAuthorship W1984361505A5004759804 @default.
- W1984361505 hasAuthorship W1984361505A5011872184 @default.
- W1984361505 hasConcept C100460472 @default.
- W1984361505 hasConcept C105487726 @default.
- W1984361505 hasConcept C111919701 @default.
- W1984361505 hasConcept C136525101 @default.
- W1984361505 hasConcept C142724271 @default.
- W1984361505 hasConcept C14737013 @default.
- W1984361505 hasConcept C160671074 @default.
- W1984361505 hasConcept C171250308 @default.
- W1984361505 hasConcept C187937830 @default.
- W1984361505 hasConcept C192562407 @default.
- W1984361505 hasConcept C204223013 @default.
- W1984361505 hasConcept C204787440 @default.
- W1984361505 hasConcept C2779227376 @default.
- W1984361505 hasConcept C41008148 @default.
- W1984361505 hasConcept C49040817 @default.
- W1984361505 hasConcept C53524968 @default.
- W1984361505 hasConcept C71924100 @default.
- W1984361505 hasConcept C98045186 @default.
- W1984361505 hasConceptScore W1984361505C100460472 @default.
- W1984361505 hasConceptScore W1984361505C105487726 @default.
- W1984361505 hasConceptScore W1984361505C111919701 @default.
- W1984361505 hasConceptScore W1984361505C136525101 @default.
- W1984361505 hasConceptScore W1984361505C142724271 @default.
- W1984361505 hasConceptScore W1984361505C14737013 @default.
- W1984361505 hasConceptScore W1984361505C160671074 @default.
- W1984361505 hasConceptScore W1984361505C171250308 @default.
- W1984361505 hasConceptScore W1984361505C187937830 @default.
- W1984361505 hasConceptScore W1984361505C192562407 @default.
- W1984361505 hasConceptScore W1984361505C204223013 @default.
- W1984361505 hasConceptScore W1984361505C204787440 @default.
- W1984361505 hasConceptScore W1984361505C2779227376 @default.
- W1984361505 hasConceptScore W1984361505C41008148 @default.
- W1984361505 hasConceptScore W1984361505C49040817 @default.
- W1984361505 hasConceptScore W1984361505C53524968 @default.
- W1984361505 hasConceptScore W1984361505C71924100 @default.
- W1984361505 hasConceptScore W1984361505C98045186 @default.
- W1984361505 hasLocation W19843615051 @default.
- W1984361505 hasOpenAccess W1984361505 @default.
- W1984361505 hasPrimaryLocation W19843615051 @default.
- W1984361505 hasRelatedWork W1544888428 @default.
- W1984361505 hasRelatedWork W1966895858 @default.
- W1984361505 hasRelatedWork W1985330728 @default.
- W1984361505 hasRelatedWork W2021685851 @default.
- W1984361505 hasRelatedWork W2057382384 @default.
- W1984361505 hasRelatedWork W2070269382 @default.
- W1984361505 hasRelatedWork W2079787243 @default.
- W1984361505 hasRelatedWork W2489430272 @default.
- W1984361505 hasRelatedWork W3016625011 @default.
- W1984361505 hasRelatedWork W3200260983 @default.
- W1984361505 isParatext "false" @default.
- W1984361505 isRetracted "false" @default.
- W1984361505 magId "1984361505" @default.
- W1984361505 workType "article" @default.