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- W1984404114 abstract "Abstract Thin films of strontium titanate and yttria stabilized zirconia have been deposited by rf-magnetron sputtering onto differently pretreated silicon surfaces. The analysis with X-ray photoelectron spectroscopy showed that at low deposition pressures even in a pure argon atmosphere a drastic oxidation of the silicon surface takes place. This oxidation is traced back to the formation of energetic oxygen particles in the sputtering plasma. In order to perform a heteroepitaxial growth of oxidic thin films it is therefore proposed either to use higher deposition pressures or a presputtering-phase using metallic targets." @default.
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- W1984404114 date "1992-09-01" @default.
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- W1984404114 title "Reoxidation of silicon substrates during the sputter deposition of oxidic thin films" @default.
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- W1984404114 doi "https://doi.org/10.1016/0038-1098(92)90145-y" @default.
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