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- W1984417118 abstract "Abstract The effect of post deposition annealing on the electrical characteristics of metal-oxide-semiconductor capacitors based on HfGdO/HfTiO and HfTiO/HfGdO gate stacks fabricated by sputtering have been investigated. Microstructure and interface chemistry of HfGdO/HfTiO/Si and HfTiO/HfGdO/Si gate stacks have also determined by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR) measurements. Comparison with HfTiO/HfGdO, it has been found that HfGdO/HfTiO gate stack has a distinct advantage for avoiding the formation of an undesired interfacial layer. In agreement with FTIR analyses, electrical measurements of MOS capacitor with HfGdO/HfTiO gate stacks indicate much more improved electrical performance than that of as-deposited and 300 °C-annealed HfTiO/HfGdO gate stacks in terms of lower gate leakage current density and high permittivity. The involved leakage current conduction mechanisms for metal-oxide-semiconductor (MOS) capacitors based on sputtered HfGdO/HfTiO and HfTiO/HfGdO gate stacks with optimal annealed temperature also have been discussed in detail." @default.
- W1984417118 created "2016-06-24" @default.
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- W1984417118 date "2015-09-01" @default.
- W1984417118 modified "2023-09-22" @default.
- W1984417118 title "Comparison of microstructure and electrical characteristics of sputtering-derived HfGdO/HfTiO and HfTiO/HfGdO gate stacks" @default.
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- W1984417118 doi "https://doi.org/10.1016/j.ceramint.2015.04.128" @default.
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