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• W1984422509 abstract "The determinants of resolution of a time-of-flight spectrometer for medium energy ion beam analysis have been identified and analyzed. The primary determinants are uncertainty of ion path length, kinematic dispersion from the finite detector solid angle, straggling in the start foil and variability of the start foil thickness. The first three of these have been considered in previous studies of time-of-flight spectrometer resolution, but foil non-uniformity has not been examined in detail. Using backscattering analysis and atomic force microscopy, we have measured the thickness and roughness of carbon start foils and found them to be larger than suggested by their nominal specifications. As a result, energy uncertainty introduced by foil non-uniformity has been found to be a critical factor in determining resolution. Using measured values of foil parameters and known geometric characteristics of our spectrometer, Monte Carlo simulations of backscattering spectra of SiO2 thin films on Si substrates have been computed and found to reproduce well the experimentally observed system resolution of 1350 eV for 104 keV He. Additional simulations show that spectrometer design changes could reduce this value to about 1 keV at which point it is, for all practical purposes, optimum." @default.
• W1984422509 created "2016-06-24" @default.
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• W1984422509 date "1999-04-01" @default.
• W1984422509 modified "2023-10-08" @default.
• W1984422509 title "Quantitative evaluation of the determinants of resolution in time-of-flight spectrometers for medium energy ion beam analysis" @default.
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• W1984422509 doi "https://doi.org/10.1016/s0168-583x(98)01093-3" @default.
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